×

Processing information management in a plasma processing tool

  • US 7,676,295 B2
  • Filed: 02/18/2005
  • Issued: 03/09/2010
  • Est. Priority Date: 02/18/2005
  • Status: Active Grant
First Claim
Patent Images

1. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate process data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

  • receiving meta-data that identifies an identification of said substrate, said meta-data further identifying a process recipe employed for processing said substrate;

    receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored, individual data items in each of said plurality of process data streams being collected;

    storing said individual data items associated with said plurality of process data streams in a single table;

    storing said single table and said meta-data in a single file, said single file storing data pertaining to only said process recipe and said substrate;

    using a process control computer to receive a registration from an application, said registration identifying a file type needed by said application;

    receiving, using said process control computer, a notification indicating that said single file in accordance with said file type has been created;

    writing said single file to said process control computer as a written file;

    updating indexes in a database with said individual data items;

    after said updating, pushing said written file to said application as a pushed file via a first path;

    after said updating, notifying said application via a second oath that said pushed file is available;

    receiving second meta-data that identifies said identification of said substrate, said second meta-data further identifying a second process recipe employed for processing said substrate; and

    creating a second file for storing said second meta-data and a processing data set, said processing data set resulted from processing said substrate using said second process recipe.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×