Processing information management in a plasma processing tool

• US 7,676,295 B2
• Filed: 02/18/2005
• Issued: 03/09/2010
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Weetman, Chad R.
• Primary Examiner(s): Masinick; Michael D
• Application Number:
  US11/061,414
• Publication Number:
  US 20060187713A1
• Time in Patent Office: 1,845 Days
• Field of Search: 700 95- 96, 700108-110, 700/121
• US Class Current: 700/110
• CPC Class Codes: G05B 19/4183 characterised by data acquisition, e.g. workpiece identification
• CPC Class Codes: G05B 2219/31304 Identification of workpiece and data for control, inspection, safety, calibration
• CPC Class Codes: G05B 2219/35391 Sort, order entered data hierarchical
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A computer-implemented method for managing substrate processing data. Substrate process data is acquired while a substrate is processed in a plasma-processing chamber of a cluster tool. The method includes receiving meta-data that identifies at least one of an identification of the substrate and a process. The method further includes receiving from transducers process data streams, each of the process data streams pertaining to a process parameter being monitored. Individual data items in each of the process data streams are being collected in accordance to one of a first methodology and a second methodology. The first methodology represents data collection that is periodic in time. The second methodology represents data collection that happens when predefined events occur. The method also includes storing individual data items associated with process data streams in a single file. The single file stores only data pertaining to a single recipe used to process the substrate.

Claims

1. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate process data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, comprising:

receiving meta-data that identifies an identification of said substrate, said meta-data further identifying a process recipe employed for processing said substrate;

receiving from a plurality of transducers a plurality of process data streams, each of said plurality of process data streams pertaining to a process parameter being monitored, individual data items in each of said plurality of process data streams being collected;

storing said individual data items associated with said plurality of process data streams in a single table;

storing said single table and said meta-data in a single file, said single file storing data pertaining to only said process recipe and said substrate;

using a process control computer to receive a registration from an application, said registration identifying a file type needed by said application;

receiving, using said process control computer, a notification indicating that said single file in accordance with said file type has been created;

writing said single file to said process control computer as a written file;

updating indexes in a database with said individual data items;

after said updating, pushing said written file to said application as a pushed file via a first path;

after said updating, notifying said application via a second oath that said pushed file is available;

receiving second meta-data that identifies said identification of said substrate, said second meta-data further identifying a second process recipe employed for processing said substrate; and

creating a second file for storing said second meta-data and a processing data set, said processing data set resulted from processing said substrate using said second process recipe.

2. The method of claim 1 further comprising providing said individual data items pertaining to said plurality of data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

3. The method of claim 1 further comprising storing said single file into an archive database, said storing including storing said individual data items associated with said plurality of data streams in a single file of said archive database.

4. The method of claim 1 further comprising creating a third file for storing a maintenance log when processing said substrate using said process recipe and said second process recipe has been completed.

5. The method of claim 1 further comprising placing said single file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein date represents a parent level of said files, file types represent a grand-parent level of said files, module IDs represent a grand-grand-parent level of said files, and tool IDs represent a grand-grand-grand-parent level of said files.

6. The method of claim 5 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

7. The method of claim 1 further comprising compressing said single file prior to said pushing.

8. The method of claim 1 further comprising furnishing said substrate process data to a customer application, said furnishing further including translating said single file into a format suitable for use by said customer application.

9. In a substrate processing environment, a computer-implemented method for managing substrate processing data, said substrate processing data being acquired while a substrate is processed in a plasma-processing chamber of a cluster tool, the method comprising:

receiving meta-data identifying said substrate, said meta-data further identifying a process recipe employed to process said substrate;

receiving individual data items pertaining to process parameters being monitored;

storing said individual data items in a singles table;

employing a single file for storing said single table and said meta-data, said single file not employed for storing substrate process data associated with other recipes, said single file also not employed for storing substrate process data associated with other substrates;

using a process control computer to receive a registration from an application, said registration identifying a file type needed by said application;

receiving, using said process control computer, a notification indicating that said single file in accordance with said file type has been created;

writing said single file to said process control computer as a second file;

updating indexes in a database with said individual data items;

after said updating, pushing said written file to said application as a pushed file via a first path; and

after said updating, notifying said application via a second path that said pushed file is available.

10. The method of claim 9 further comprising providing said individual data items pertaining to said plurality of data streams substantially in real time to a real-time process control computer, said real-time process control computer being configured to analyze said individual data items while said substrate is processed to monitor for process irregularities.

11. The method of claim 9 further comprising storing said single file into an archive database, said storing including storing said individual data items associated with said plurality of data streams in a single file of said archive database.

12. The method of claim 9 further comprising creating a log file for storing a maintenance log when processing said substrate has using said process recipe has been completed.

13. The method of claim 9 further comprising placing said single file into a processing data hierarchy, said processing data hierarchy comprising files stored as leaf nodes in a tree-like storage arrangement, wherein date represents a parent level of said files, file types represent a grand-parent level of said files, module IDs representing a grand-grand-parent level of said files, and tool IDs representing a grand-grand-grand-parent level of said files.

14. The method of claim 13 wherein said tree-like storage arrangement is navigable on a display screen by a user employing a navigation interface, said navigation interface permitting said user to view said tree-like storage arrangement and to select any of said leaf nodes for viewing.

15. The method of claim 9 further comprising providing said single file to an application, said providing further including compressing said single file prior to transmitting to said application.

16. The method of claim 9 further comprising furnishing said substrate processing data to a customer application, said furnishing further including translating said single file into a format suitable for use by said customer application.

17. A method for processing at least a substrate in a plasma processing system, the method comprising:

receiving meta-data that identifies an identification of said substrate, said meta-data further identifying a first process recipe employed for processing said substrate in a first plasma processing chamber;

receiving data items pertaining to process parameters monitored when said substrate is processed in said plasma processing chamber with said first process recipe;

storing said meta-data and said data items in a single file, said single file not employed for storing substrate process data associated with other process recipes, said single file also not employed for storing substrate process data associated with other substrates;

using a process control computer to receive a registration from an application, said registration identifying a file type needed by said application;

receiving, using said process control computer, a notification indicating that said single file in accordance with said file type has been created;

writing said single file to said process control computer as a written file;

updating indexes in a database with said data items;

after said updating, pushing said written file to said application as a pushed file via a first path; and

after said updating, notifying said application via a second path that said pushed file is available.

18. The method of claim 17 further comprising:

receiving second meta-data that identifies said identification of said substrate, said second meta-data further identifying a second process recipe employed for processing said substrate in a second plasma processing chamber; and

creating a second single file for storing said second meta-data and a processing data set, said processing data set resulted from processing said substrate with said second process recipe in said second plasma processing chamber.

19. The method of claim 17 further comprising using said process control computer to notify an interface module that said application needs a file of said file type.

20. The method of claim 17 further comprising providing said data items to a customer application at the same time of performing said pushing and said notifying.