Sensor assembly, digital serial bus and protocol, sensor network, and lithographic apparatus and system

• US 7,676,342 B2
• Filed: 12/23/2004
• Issued: 03/09/2010
• Est. Priority Date: 12/23/2004
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Gijsbertse, Ronald, Vreede, Olaf Theo Jos, Tillie, Fransiscus Antonius Josephus, Palm, Adrianus Johannes
• Primary Examiner(s): Nghiem; Michael P.
• Assistant Examiner(s): Le; Toan M
• Application Number:
  US11/019,523
• Publication Number:
  US 20060138307A1
• Time in Patent Office: 1,902 Days
• Field of Search: 702/127, 702182-183, 702/188, 702/81, 702/84, 257/E21.528, 438/14, 438/16, 370/464, 700/108, 250/491.1, 250/492.2, 25049221-49224, 250/492.3, 250/200, 250/203.2, 250/214.R, 250/548
• US Class Current: 702/127
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G03F 7/70525 Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure

Abstract

An sensor assembly according to one embodiment includes a sensor, an analog-to-digital converter configured to digitize a data signal received from the sensor, and an array of logic elements configured to receive a first data transmission over a serial bus and to transmit a second data transmission including information in the digitized signal over the serial bus. The array of logic elements is configured to transmit the second data transmission according to information received in the first data transmission.

Claims

1. A sensor assembly, comprising:

a sensor configured to output sensor data;

an analog-to-digital converter configured to receive an analog signal corresponding to the sensor data and to output a digital signal of the sensor data; and

a local processor that is electrically coupled to the analog-to-digital converter and is configured to receive a first data transmission from a remote processor and to transmit a second data transmission,

wherein the local processor is configured to transmit the second data transmission based on information received in the first data transmission,

wherein the first transmission includes an address of a target sensor assembly.

2. The sensor assembly according to claim 1, wherein the first data transmission comprises pretrigger commands and wherein the second data transmission comprises an acknowledgement of receipt of the pretrigger commands.

3. The sensor assembly according to claim 2, wherein the first and second data transmissions includes a data frame and wherein a first data byte of the first data transmission includes the address of the target sensor assembly.

4. The sensor assembly according to claim 2, wherein the local processor transmits the second data transmission based on a timeslot that is defined by the pretrigger commands in the first data transmission.

5. The sensor assembly according to claim 2, wherein the digital signal includes information corresponding to a value of the sensor data measured at a time indicated by the pretrigger commands in the first data transmission.

6. The sensor assembly according to claim 1, wherein the first data transmission comprises an address packet and wherein the second data transmission comprises sensor data.

7. The sensor assembly according to claim 6, said sensor assembly comprising a plurality of sensors,

wherein the digital signal includes information corresponding to a value of the sensor data received from a selected one of the sensors, and

wherein said selected one of the sensors is selected based on information received in the first data transmission.

8. The sensor assembly according to claim 1, wherein the sensor data comprises one of measurement data and configuration data.

9. The sensor assembly according to claim 1, wherein the second data transmission is initiated based on the information received in the first data transmission.

10. The sensor assembly according to claim 1, wherein the local processor is coupled to a bus.

11. The sensor assembly according to claim 10, wherein the bus is a digital serial bus.

12. The sensor assembly according to claim 1, wherein the sensor comprises a photosensitive element.

13. The sensor assembly according to claim 1, wherein the sensor assembly is configured to operate in a vacuum.

14. A method of providing data to a remote processor, said method comprising:

receiving information over a serial data line from the remote processor;

generating an analog signal corresponding to a condition sensed at a measurement site;

at a location local to the measurement site, obtaining a digital signal based on the analog signal;

at the location local to the measurement site, outputting a serial data stream based on the digital signal; and

transporting information over the serial data line to the remote processor,

wherein at least one among said generating the analog signal, obtaining the digital signal, and outputting the serial data stream is performed in accordance with the information received over the serial data line,

wherein receiving information over the serial data line includes receiving an address of a target sensor assembly.

15. The method of claim 14, wherein receiving information over the serial data line includes receiving the information as a first data frame, wherein the serial data stream includes a second data frame, and wherein a first data byte of the first data frame includes the address of the target sensor assembly.

16. The method of claim 14, wherein receiving information over the serial data line includes receiving pretrigger commands in a first data frame and wherein the serial data stream includes an acknowledgement of receipt of the pretrigger commands in a second data frame.

17. The method of claim 16, wherein outputting the serial data stream is based on a timeslot that is defined by pretrigger commands received over the serial data line.

18. The method of claim 16, wherein the digital signal includes information corresponding to a value of the measurement signal measured at a time indicated by the pretrigger commands received over the serial data line.

19. The method of claim 14, wherein outputting the serial data stream is initiated based on the information received over the serial data line.

20. The method of claim 14, said method comprising generating a plurality of analog signals corresponding to conditions sensed at the measurement site,

wherein the digital signal includes information corresponding to a value of a selected one of the plurality of analog signals, and

wherein said selected one of the plurality of analog signals is selected based on said information received over the serial data line.

21. The method of data measurement according to claim 14, wherein said generating the analog signal comprises generating the analog signal based on at least one of measuring illumination, temperature, pressure, acceleration, and presence detection of objects.

22. The method of data measurement according to claim 14, wherein said measurement site is located in a vacuum chamber.

23. A method of data acquisition, said method comprising:

transmitting digital control information to a sensor assembly in a vacuum area over a serial data bus, said digital control information including an address of the sensor assembly; and

based on the control information, receiving a serial data stream over the serial data bus, said serial data stream including digital sensor data from the sensor assembly.

24. The method of data acquisition according to claim 23, wherein said transmitting digital control information includes transmitting a first data frame including said digital control information having pretrigger commands,

wherein said serial data stream includes a second data frame including said digital sensor data, and

wherein a first data byte of the first data frame includes the address of the sensor assembly.

25. The method of data acquisition according to claim 24, wherein the serial data stream is transmitted based on a timeslot that is defined by the pretrigger commands.

26. The method of data acquisition according to claim 24, wherein the serial data stream includes information corresponding to a value of sensor data measured at a time indicated by the pretrigger commands in said digital control information.

27. The method of data acquisition according to claim 23, wherein said transmitting digital control information includes a first data frame comprising an address packet and wherein said serial data stream includes a second data frame comprising said digital sensor data.

28. The method of data acquisition according to claim 23, wherein the sensor data comprises one of measurement data configuration data.

29. The method of data acquisition according to claim 23, wherein said serial data stream is transmitted at a time designated by the digital control information.

30. The method of data acquisition according to claim 23, wherein said serial data stream includes digital sensor data from a selected one of a plurality of sensor assemblies, and

wherein the selected one of a plurality of sensor assemblies is selected based on the digital control information.

31. The method of data acquisition according to claim 23, wherein the digital sensor data comprises at least one of illumination, temperature, pressure, acceleration, and presence detection of objects.