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Integrated microelectromechanical systems (MEMS) vibrating mass Z-axis rate sensor

  • US 7,677,099 B2
  • Filed: 11/05/2007
  • Issued: 03/16/2010
  • Est. Priority Date: 11/05/2007
  • Status: Active Grant
First Claim
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1. An angular rate sensor configured to measure angular velocity about an axis that is normal to a sensing plane of the angular rate sensor, the angular rate sensor comprising:

  • a sensing subassembly comprisinga substantially planar frame parallel to the sensing plane;

    a first proof mass disposed in the sensing plane;

    a second proof mass disposed in the sensing plane laterally to the first proof mass; and

    a linkage within the frame and connected to the frame, the linkage being connected to the first proof mass and to the second proof mass;

    an actuator for driving the first proof mass and the second proof mass into oscillation along a drive axis in the sensing plane, the actuator to drive the first proof mass and the second proof mass 180 degrees out-of-phase;

    a first transducer to sense motion of the frame in response to a Coriolis force acting on the oscillating first proof mass and the oscillating second proof mass in the sensing plane; and

    a base plate which is parallel to the sensing plane and to which the sensing subassembly is attached.

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