Wireless pressure sensor and method for fabricating wireless pressure sensor for integration with an implantable device
First Claim
1. A method for fabricating a wireless pressure sensor, the method comprising:
- providing a first substrate;
controllably displacing a portion of the first substrate to form a cavity;
patterning a conducting material on the first substrate to form a first capacitor plate and a first inductor;
providing a second substrate;
patterning a conducting material on the second substrate to form a second capacitor plate;
attaching the second substrate to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition.
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Accused Products
Abstract
A method for fabricating a wireless pressure sensor includes providing a first substrate. A portion of the first substrate is controllably displaced to form a cavity. A conducting material is patterned on the first substrate to form a first capacitor plate and a first inductor. A second substrate is provided. A conducting material is patterned on the second substrate to form a second capacitor plate. The second substrate is attached to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. A hermetically sealed capacitive pressure sensor may reside in the cavity between the first substrate and second substrate.
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Citations
28 Claims
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1. A method for fabricating a wireless pressure sensor, the method comprising:
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providing a first substrate; controllably displacing a portion of the first substrate to form a cavity; patterning a conducting material on the first substrate to form a first capacitor plate and a first inductor; providing a second substrate; patterning a conducting material on the second substrate to form a second capacitor plate; attaching the second substrate to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A wireless pressure sensor comprising:
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a first substrate defining a cavity; a first conducting material patterned on the first substrate, the patterned conducting material forming a first capacitor plate and a first inductor; a second substrate; and a second conducting material patterned on the second substrate, the patterned conducting material forming a second capacitor plate, the second substrate coupled to the first substrate to seal the cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for fabricating a flexible sheet of wireless sensors, the method comprising:
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providing a first substrate; controllably displacing a plurality of portions of the first substrate to form a plurality of cavities; patterning a conducting material to form a plurality of corresponding first capacitor plates and corresponding first inductors; providing a second substrate; patterning a conducting material on the second substrate to form a plurality of second capacitor plates; attaching the second substrate to the first substrate to seal each cavity such that at least a portion of the second substrate is movable with respect to the first substrate within the cavity in response to a change in an external condition.
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24. A method for fabricating an endovascular implant from a sheet of flexible material including at least one wireless sensor, the method comprising:
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providing a sheet of flexible material; patterning conductive traces diagonally across the sheet of flexible material such that when the flexible sheet is positioned about a tubular cylindrical mold structure, the conductive traces are aligned to create an inductor coil; and affixing at least one sensor to the sheet of flexible material, the at least one sensor electrically connected to the inductor coil; and wrapping the sheet of flexible material about the tubular cylindrical mold structure such that the inductor coil wraps circumferentially around the sheet of flexible material. - View Dependent Claims (25, 26, 27, 28)
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Specification