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Cantilever microprobes for contacting electronic components and methods for making such probes

  • US 7,679,388 B2
  • Filed: 04/02/2007
  • Issued: 03/16/2010
  • Est. Priority Date: 02/04/2003
  • Status: Expired due to Fees
First Claim
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1. A probe device for contacting an electronic component, comprising:

  • a base element for mounting to a laterally extending surface of a substrate;

    at least one post element having a proximal end attached to the base element and having a distal end;

    a composite beam element, comprising at least two vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and

    a contact element, comprising a laterally extending cantilever portion and a vertically extending portion defining a contact tip, wherein the laterally extending cantilever portion has a proximal end connected to the bridge element and a distal end to which the vertically extending portion connects.

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