Cantilever microprobes for contacting electronic components and methods for making such probes
First Claim
1. A probe device for contacting an electronic component, comprising:
- a base element for mounting to a laterally extending surface of a substrate;
at least one post element having a proximal end attached to the base element and having a distal end;
a composite beam element, comprising at least two vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and
a contact element, comprising a laterally extending cantilever portion and a vertically extending portion defining a contact tip, wherein the laterally extending cantilever portion has a proximal end connected to the bridge element and a distal end to which the vertically extending portion connects.
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Accused Products
Abstract
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, for example, cantilever probes have extended base structures, slide in mounting structures, multi-beam configurations, offset bonding locations to allow closer positioning of adjacent probes, compliant elements with tensional configurations, improved over travel, improved compliance, improved scrubbing capability, and/or the like.
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Citations
21 Claims
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1. A probe device for contacting an electronic component, comprising:
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a base element for mounting to a laterally extending surface of a substrate; at least one post element having a proximal end attached to the base element and having a distal end; a composite beam element, comprising at least two vertically spaced laterally extending beams, each beam having a distal end and a proximal end, wherein the proximal end of each beam is attached to the at least one post element, and wherein the distal end of each beam is attached to a bridge element; and a contact element, comprising a laterally extending cantilever portion and a vertically extending portion defining a contact tip, wherein the laterally extending cantilever portion has a proximal end connected to the bridge element and a distal end to which the vertically extending portion connects. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A probe device for contacting an electronic component, comprising:
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a base element for mounting to a laterally extending surface of a substrate; at least one post element having a proximal end attached to the base element and having a distal end; a cantilever beam element having a distal end and a proximal end, wherein the proximal end of the cantilever beam element is attached to the at least one post element; and a contact element, comprising a laterally extending cantilever portion and a vertically extending portion defining a contact tip, wherein the laterally extending cantilever portion has a proximal end connected directly or indirectly to the cantilever beam and a distal end to which the vertically, extending portion connects. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An array of probes for contacting a plurality of pads of an electronic component, comprising:
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(a) a plurality of elongated probes mounted to and extending above a substrate wherein each probe has a contact tip and an orientation and wherein the contact tips of the plurality of probes have a desired configuration, wherein each of the plurality of elongated probes, comprises; (i) a base element for mounting to a laterally extending surface of a substrate; (ii) at least one post element having a proximal end attached to the base element and having a distal end; (iii) a cantilever beam element having a distal end and a proximal end, wherein the proximal end of the cantilever beam element is attached to the at least one post element; and (iv) a contact element, comprising a laterally extending cantilever portion and a vertically extending portion defining a contact tip, wherein the laterally extending cantilever portion has a proximal end connected directly or indirectly to the cantilever beam and a distal end to which the vertically extending portion connects; and wherein the configuration of the contact tips of at least a portion of the plurality of elongated probes define a line and wherein successive elongated probes whose contact tips are along the line have reversed orientations such that a pitch of the contact tips along the line is tighter than a pitch of adjacent probes having a similar orientations. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification