Dynamic matrix sensitivity measuring instrument for inertial sensors, and measuring method therefor
First Claim
1. A device for measuring dynamic matrix sensitivity of an inertia sensor, comprising:
- a motion generating machine for inducing a motion including at least one of a translational motion and a rotational motion, wherein a degree of freedom of the motion is N (1≦
N≦
6, and N is an integer);
a unit subject to calibration provisionally fixed on a table of the motion generating machine, constituted by at least one of an acceleration measuring unit, an angular velocity measuring unit and an angular acceleration measuring unit, wherein a degree of freedom of detection is M (1≦
M≦
6, and M is an integer);
output means for fetching an output from the unit subject to calibration;
one or more light reflectors;
a displacement measuring unit enabled to grasp a multidimensional motion by using a laser interferometer formed by irradiating the one or more light reflectors with laser beams from as many directions;
a processing unit for calculating an M×
N dynamic sensitivity matrix Sp,q(ω
) of the unit subject to calibration based on an output from the unit subject to calibration when the motion generating machine is vibrated by a vibration vector (ai,x1(jω
t), ai,x2(jω
t), . . . , ai,xN(jω
t))) (1≦
i≦
N, j is an imaginary unit, ω
=2π
f, and f is a frequency of vibration) and a data indicating a state of the multidimensional motion obtained from the displacement measuring unit; and
displaying means to display or a transmitting means to transmit an output of the processing unit and output of the unit subject to calibration.
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Accused Products
Abstract
A device for measuring the dynamic matrix sensitivity of an inertia sensor is provided with a motion generating machine or a vibrating table for inducing a translational or rotary motion, an acceleration measuring unit, an angular velocity measuring unit or angular acceleration measuring unit, an output device for fetching an output from the unit, one or, pre light reflectors, a displacement measuring device for seizing a multidimensional motion by using a laser interferometer radiating light from a plurality of directions to the light reflectors, a data processing unit for processing a data indicating the state of motion and obtained from the displacement measuring unit, and a displaying device to display or a transmitting device to transmit the output of the data processing unit and the output of the acceleration measuring unit, angular velocity measuring unit or angular acceleration measuring unit. Since the accelerometer is exposed to acceleration in every conceivable direction and possibly fails to find a correct value of acceleration as encountered by the conventional one-dimensional calibration, it is actually calibrated by applying acceleration from all possible directions thereto.
18 Citations
18 Claims
-
1. A device for measuring dynamic matrix sensitivity of an inertia sensor, comprising:
-
a motion generating machine for inducing a motion including at least one of a translational motion and a rotational motion, wherein a degree of freedom of the motion is N (1≦
N≦
6, and N is an integer);a unit subject to calibration provisionally fixed on a table of the motion generating machine, constituted by at least one of an acceleration measuring unit, an angular velocity measuring unit and an angular acceleration measuring unit, wherein a degree of freedom of detection is M (1≦
M≦
6, and M is an integer);output means for fetching an output from the unit subject to calibration; one or more light reflectors; a displacement measuring unit enabled to grasp a multidimensional motion by using a laser interferometer formed by irradiating the one or more light reflectors with laser beams from as many directions; a processing unit for calculating an M×
N dynamic sensitivity matrix Sp,q(ω
) of the unit subject to calibration based on an output from the unit subject to calibration when the motion generating machine is vibrated by a vibration vector (ai,x1(jω
t), ai,x2(jω
t), . . . , ai,xN(jω
t))) (1≦
i≦
N, j is an imaginary unit, ω
=2π
f, and f is a frequency of vibration) and a data indicating a state of the multidimensional motion obtained from the displacement measuring unit; anddisplaying means to display or a transmitting means to transmit an output of the processing unit and output of the unit subject to calibration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification