Plasma processing apparatus and control method thereof
First Claim
1. A plasma processing apparatus, comprising:
- a lower electrode disposed in a processing chamber, capable of mounting an object to be processed thereon;
an upper electrode disposed in the chamber to face the lower electrode;
a first high-frequency power supply and a second high-frequency power supply for applying high-frequency powers to the lower electrode; and
an output controller for raising respective outputs of the first and the second high-frequency power supply up to respective set levels for processing the object to be processed,wherein the output controller controls the respective outputs of the high-frequency power supplies to be raised stepwise in at least three steps,wherein the output controller regulates raise timings of the outputs of the respective high-frequency power supplies so that raising the output of the second high-frequency power supply is followed by raising the output of the first high-frequency power supply, andwherein the output of the first high-frequency power supply is higher than the output of the second high-frequency power supply.
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Abstract
There is provided a plasma processing apparatus includes a lower electrode in a processing chamber on which a object to be processed is mounted; an upper electrode confronting the lower electrode; a first and a second high-frequency power supply for applying high-frequency powers respectively to the upper and the lower electrode; and an output controller for raising each of outputs from the high-frequency power supplies at least three times in a stepwise manner up to each of set levels for processing the object to be processed. The output controller adjusts each of rising times of the outputs from the high-frequency power supplies so that an output of the second high-frequency power supply is raised earlier than an output of the first high-frequency power supply while the outputs from the high-frequency power supplies are raised up to the set levels in a stepwise manner.
9 Citations
16 Claims
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1. A plasma processing apparatus, comprising:
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a lower electrode disposed in a processing chamber, capable of mounting an object to be processed thereon; an upper electrode disposed in the chamber to face the lower electrode; a first high-frequency power supply and a second high-frequency power supply for applying high-frequency powers to the lower electrode; and an output controller for raising respective outputs of the first and the second high-frequency power supply up to respective set levels for processing the object to be processed, wherein the output controller controls the respective outputs of the high-frequency power supplies to be raised stepwise in at least three steps, wherein the output controller regulates raise timings of the outputs of the respective high-frequency power supplies so that raising the output of the second high-frequency power supply is followed by raising the output of the first high-frequency power supply, and wherein the output of the first high-frequency power supply is higher than the output of the second high-frequency power supply. - View Dependent Claims (2)
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3. A plasma processing apparatus, comprising:
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a lower electrode disposed in a processing chamber, capable of mounting an object to be processed thereon; an upper electrode disposed in the chamber to face the lower electrode; a first high-frequency power supply and a second high-frequency power supply for applying high-frequency powers to at least one of the upper and the lower electrode; and an output controller for raising respective outputs of the first and the second high- frequency power supply up to respective set levels for processing the object to be processed, wherein the output controller regulates raise timings of the outputs of the respective high-frequency power supplies so that raising the output of the second high-frequency power supply is followed by raising the output of the first high-frequency power supply, while the outputs of the high-frequency power supplies are raised up to the respective set levels, and wherein the output controller controls the outputs of the high-frequency power supplies to be raised stepwise during a certain interval and continuously during the rest. - View Dependent Claims (4, 5, 6, 7, 8)
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9. A method for controlling a plasma processing apparatus including a lower electrode in a processing chamber on which an object to be processed is mounted, an upper electrode disposed in the chamber to face the lower electrode, and a first high-frequency power supply and a second high-frequency power supply for applying high-frequency powers to the lower electrode, the method comprising the step of:
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raising respective outputs of the high-frequency power supplies to reach respective set levels for processing the object to be processed, wherein the respective outputs of the high-frequency power supplies are controlled to be raised stepwise in at least three steps, wherein respective raise timings of the outputs of the high-frequency power supplies are controlled such that raising the output of the second high-frequency power supply is followed by raising the output of the first high-frequency power supply while the respective outputs of the high-frequency power supplies are raised to the respective set levels, and wherein the outputs of the high-frequency power supplies are supplied to the lower electrode. - View Dependent Claims (10)
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11. A method for controlling a plasma processing apparatus including a lower electrode in a processing chamber on which an object to be processed is mounted, an upper electrode disposed in the chamber to face the lower electrode, and a first high-frequency power supply and a second high-frequency power supply for applying high-frequency powers to at least one of the upper and the lower electrode, the method comprising the step of:
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raising respective outputs of the high-frequency power supplies to reach respective set levels for processing the object to be processed, wherein respective raise timings of the outputs of the high-frequency power supplies are controlled such that raising the output of the second high-frequency power supply is followed by raising the output of the first high-frequency power supply while the respective outputs of the high-frequency power supplies are raised to the respective set levels, and wherein the outputs of the high-frequency power supplies are controlled to be raised stepwise during a certain interval and continuously during the rest. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification