Using an interferometer as a high speed variable attenuator

• US 7,683,300 B2
• Filed: 10/17/2006
• Issued: 03/23/2010
• Est. Priority Date: 10/17/2006
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV, ASML Netherlands BV (ASML Holding NV)
• Inventors: Noordman, Oscar Franciscus Jozephus, Kreuzer, Justin L.
• Primary Examiner(s): Epps; Georgia Y
• Assistant Examiner(s): WILLIAMS, DON J
• Application Number:
  US11/581,786
• Publication Number:
  US 20080117494A1
• Time in Patent Office: 1,253 Days
• Field of Search: 250/205, 250/237.G, 250/550, 250/201.1, 250/201.2, 250/201.3, 250/201.4, 250/201.8, 250/201.9, 250/204, 250/559.49, 398/85, 359/569, 359/583, 359/584, 359/497, 359/499, 359/291, 359/308, 359/247, 358/60, 355/67, 355/69, 355/66, 355/68, 327/308, 327/520, 385/27, 385/140, 385/37
• US Class Current: 250/205
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G03F 7/70041 by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose

Abstract

A system and method provides high speed variable attenuators. The attenuators can be used within a lithographic apparatus to control intensity of radiation in one or more correction pulses used to correct a dose of the radiation following an initial pulse of radiation.

Claims

1. A variable attenuator configured to adjust its level of transmission of an input beam of radiation in response to an input control signal that represents a desired level of transmission of the variable attenuator to the beam of radiation, comprising:

first and second semi-transparent reflectors, arranged substantially mutually parallel and such that the beam of radiation successively passes through the first and second semi-transparent reflectors; and

an actuator system that is configured to control the separation of the first and second semi-transparent reflectors in response to the input control signal.

2. The variable attenuator of claim 1, wherein the beam of radiation is incident on the first semi-transparent reflector at an oblique angle.

3. The variable attenuator of claim 1, further comprising a controller that is configured to provide control signals to the actuator system in order to control the actuator system in response to the input control signal.

4. The variable attenuator of claim 3, wherein:

the controller includes a memory configured to store calibration data corresponding to a relationship between the level of transmission of the attenuator and the control signals; and

the controller is configured to generate the control signals for the actuator system in response to the input control signal and based on the calibration data.

5. The variable attenuator of claim 3, further comprising:

a position sensor system configured to measure the relative position of the first and second semi-transparent reflectors; and

wherein the controller is configured to generate the control signals for the actuator system in response to the input control signal and based on the measured relative position of the first and second semi-transparent reflectors.

6. The variable attenuator of claim 5, wherein:

the controller is configured to determine a desired relative position of the first and second semi-transparent reflectors based on the input control signal and to generate the control signals for the actuator system based on the difference between the desired and measured relative position of the first and second semi-transparent reflectors.

7. The variable attenuator of claim 5, wherein:

the actuator system is further configured to control the relative angular position of the first and second semi-transparent reflectors; and

the controller is configured such that it provides control signals to the actuator system to control the relative angular position of the first and second semi-transparent reflectors based on the measured relative position of the first and second semi-transparent reflectors.

8. The variable attenuator of claim 3, further comprising:

a source of radiation configured to generate a second beam of radiation that is incident on one of the first and second semi-transparent reflectors at a different angle from that at which the first beam of radiation is incident on the first semi-transparent reflector; and

a detector system that is configured to inspect the second beam of radiation after it has passed through the first and second semi-transparent reflectors,

wherein the detector system is configured to measure the intensity of the second beam of radiation passing through the variable attenuator, and

wherein the controller is configured to generate the control signals for the actuator system in response to the input control signal based on the measured intensity of the second beam of radiation.

9. The variable attenuator of claim 8, wherein:

the detector system is further configured to measure the uniformity of the radiation intensity across a cross section of the second beam of radiation;

the actuator system is further configured to control the relative angular position of the first and second semi-transparent reflectors; and

the controller is configured such that it provides control signals to the actuator system to control the relative angular position of the first and second semi-transparent reflectors based on the measured uniformity of the radiation intensity across the cross section of the second beam of radiation.

10. A variable attenuator configured to adjust its level of transmission to an input beam of radiation in response to an input control signal that represents a desired level of transmission of the variable attenuator to the beam of radiation, comprising:

a radiation beam splitter that divides the beam of radiation onto first and second radiation beam paths;

a radiation beam combiner that re-combines radiation from the first and second radiation beam paths, such the re-combined radiation interferes and produces an output beam of radiation; and

a radiation beam pathlength controller configured to control a pathlength of the first radiation beam path in response to the input control signal in order to control the interference of the radiation from the first and second radiation beam paths.

11. The variable attenuator of claim 10, wherein the radiation beam pathlength controller comprises a reflector and an actuator system configured to control the position of the reflector, such that the radiation beam pathlength controller can alter the pathlength of the first radiation beam path.

12. The variable attenuator of claim 11, further comprising a controller that is configured to provide control signals to the actuator system in order to control the actuator system in response to the input control signal.

13. The variable attenuator of claim 12, wherein:

the controller includes a memory configured to store calibration data corresponding to a relationship between the level of transmission of the attenuator and the control signals; and

the controller is configured to generate the control signals for the actuator system in response to the input control signal based on the calibration data.

14. The variable attenuator of claim 12, further comprising:

a source of radiation configured to generate a second beam of radiation and to direct it to the radiation beam splitter, such that the second beam of radiation is divided into the first and second beam paths and re-combined by the radiation beam combiner; and

a detector system that is configured to inspect the second beam of radiation once it has been re-combined by the radiation beam combiner;

wherein the detector system is configured to measure the intensity of the second beam of radiation, and

wherein the controller is configured to generate the control signals for the actuator system in response to the input control signal based on the measured intensity of the second beam of radiation.

15. The variable attenuator of claim 14, wherein:

the detector system is further configured to measure the uniformity of the radiation intensity across the cross section of the second beam of radiation;

the actuator system is further configured such that it can control the angle of the reflector of the radiation beam pathlength controller relative to a beam of radiation propagating through the first radiation beam path which, in turn, controls the relative angle of incidence of the radiation from the first and second radiation beam paths in the radiation beam combiner; and

the controller is configured such that it provides control signals to the actuator system to control the angle of the reflector of the radiation beam pathlength controller based on the measured uniformity of the radiation intensity across the cross section of the second beam of radiation.

16. A variable attenuator configured to adjust its level of transmission to an input beam of radiation in response to an input control signal that represents a desired level of transmission of the variable attenuator to the beam of radiation, comprising:

first and second phase gratings; and

an actuator system;

wherein the first and second phase gratings are arranged substantially mutually parallel and so that the beam of radiation is initially incident on the first phase grating and then is incident on the second phase grating;

wherein each of the phase gratings comprises a plurality of regions of a first type and a plurality of regions of a second type,

wherein the phase gratings are constructed such that, for each phase grating, a phase shift introduced to the beam of radiation passing through the regions of the first type is a quarter of a wavelength of the beam of radiation input to the variable attenuator greater than for the regions of the second type, and

wherein actuator system is configured to adjust the relative positions of the first and second phase gratings in response to the input control signal at least between a first position, in which radiation passing through regions of the first and second type of the first phase grating subsequently passes through regions of the first and second type, respectively, of the second phase grating, and a second position, in which radiation passing through regions of the first and second type of the first grating subsequently passes through regions of the second and first type, respectively, of the second phase grating.

17. The variable attenuator of claim 16, wherein:

zero order radiation that has passed through the first and second phase gratings is directed as an output of the variable attenuator; and

the variable attenuator comprises at least one radiation dump to which higher positive or higher negative orders, or both, of radiation that has passed through the first and second phase gratings are directed.

18. The variable attenuator of claim 16, further comprising a controller that is configured to provide control signals to the actuator system in order to control the actuator system in response to the input control signal.

19. The variable attenuator of claim 18, wherein:

the controller includes a memory configured to store calibration data corresponding to the relationship between the transmission level of the attenuator and the control signals; and

the controller is configured to generate the control signals for the actuator system in response to the input control signal and based on the calibration data.

20. The variable attenuator of claim 18, further comprising:

a position sensor system configured to measure the relative position of the first and second phase gratings; and

wherein the controller is configured to generate the control signals for the actuator system in response to the input control signal and based on the measured relative position of the first and second phase gratings.

21. The variable attenuator of claim 20, wherein the controller is configured to determine a desired relative position of the first and second phase gratings based on the input control signal and to generate the control signals for the actuator system based on the difference between the desired and measured relative position of the first and second phase gratings.

22. The variable attenuator of claim 20, wherein:

the actuator system is further configured to control a relative angular position of the first and second phase gratings; and

the controller is configured such that it provides control signals to the actuator system to control the relative angular position of the first and second phase gratings based on the measured relative position of the first and second phase gratings.

23. The variable attenuator of claim 18, further comprising:

a source of radiation configured to generate a second beam of radiation that is directed to pass through the first and second phase gratings at a location different from the first beam of radiation; and

a radiation detector configured to detect intensity of zero order radiation derived from the second beam of radiation that has passed through the first and second phase gratings,

wherein the controller is configured to generate the control signals for the actuator system in response to the input control signal based on the intensity measured by the radiation detector.

24. The variable attenuator of claim 23, wherein:

the source of radiation and the radiation detector form a first sensor for providing information to the controller related to the relative position of the first and second phase gratings;

the variable attenuator comprises at least one further sensor corresponding to the first sensor generating a corresponding beam of radiation that passes through the first and second phase gratings at a location different from the first and second beams of radiation; and

the controller is configured to generate the control signals for the actuator system in response to the input control signal based on the information provided by the sensors.

25. The variable attenuator of claim 16, wherein the second phase grating is separated from the first phase grating and lies in a Talbot plane of the first grating or a half-Talbot plane of the first grating.

26. A lithographic apparatus, comprising:

an illumination system configured to condition a pulsed beam of radiation;

a variable attenuator configured such that it attenuates the intensity of at least one pulse of the pulsed beam of radiation, wherein the variable attenuator comprises one of,

a) two semi-transparent reflectors and a path length controller,

b) a beam splitter, a beam combiner, and a path length controller, or

c) two phase gratings and a path length controller, and

a control system, configured to determine a desired intensity of a pulse of radiation and to provide a control signal to the variable attenuator, corresponding to a desired level of transmission of the variable attenuator to the beam of radiation, necessary to attenuate the pulse to the desired intensity.

27. The lithographic apparatus of claim 26, comprising a plurality of the variable attenuators arranged in series.

28. A device manufacturing method, comprising:

forming a variable attenuator using first and second semi-transparent reflectors that are arranged substantially mutually parallel, such that a pulsed beam of radiation successively passes through the first and second semi-transparent reflectors;

controlling separation of the first and second semi-transparent reflectors in response to an input control signal,

attenuating an intensity of at least one pulse of the pulsed beam of radiation using the variable attenuator, which is configured to adjust its level of transmission to an input beam of radiation in response to the input control signal, which represents a desired level of transmission of the variable attenuator to the beam of radiation;

modulating a pulsed beam of radiation; and

projecting the modulated beam onto a substrate.

29. A device manufacturing method, comprising:

forming a variable attenuator using a radiation beam splitter that divides a pulsed beam of radiation into first and second radiation beam paths and a radiation beam combiner that re-combines radiation from the first and second radiation beam paths such that it interferes and produces an output beam of radiation;

using a radiation beam pathlength controller to control the pathlength of the first radiation beam path in response to an input control signal in order to control the interference of the radiation from the first and second radiation beam paths;

attenuating intensity of at least one pulse of the pulsed beams of radiation using the variable attenuator that is configured to adjust its level of transmission to an input beam of radiation in response to the input control signal, which represents a desired level of transmission of the variable attenuator to the beam of radiation;

modulating the pulsed beam of radiation from the variable attenuator; and

projecting it onto a substrate.

30. A device manufacturing method, comprising:

forming a variable attenuator from first and second phase gratings that are arranged substantially mutually parallel, such that a pulsed beam of radiation is initially incident on the first phase grating and, having passed through the first phase grating, is incident on the second phase grating;

forming a plurality of regions of a first type and a plurality of regions of a second type on each of the phase gratings;

constructing the phase gratings such that, for each phase grating, a phase shift introduced to the pulsed beam of radiation passing through the regions of the first type is a quarter of the wavelength of the beam of radiation input to the variable attenuator greater than for the regions of the second type;

adjusting the relative positions of the first and second phase gratings in response to an input control signal at least between a first position, in which the radiation passing through regions of the first and second type of the first phase grating subsequently passes through regions of the first and second type, respectively, of the second phase grating, and a second position, in which radiation passing through regions of the first and second type of the first grating subsequently passes through regions of the second and first type, respectively, of the second phase grating;

attenuating intensity of at least one pulse of the pulsed beam of radiation using the variable attenuator configured to adjust its level of transmission to an input beam of radiation in response to the input control signal, which represents a desired level of transmission of the variable attenuator to the beam of radiation, comprising; and

modulating the pulsed beam of radiation; and

projecting the modulated beam onto a substrate.