Apparatus and method for improving drive-strength and leakage of deep submicron MOS transistors

• US 7,683,433 B2
• Filed: 09/19/2006
• Issued: 03/23/2010
• Est. Priority Date: 07/07/2004
• Status: Expired due to Fees

• Current Assignee: Semi Solutions LLC
• Original Assignee: Semi Solutions LLC
• Inventors: Kapoor, Ashok Kumar, Marko, Reuven, Strain, Robert
• Primary Examiner(s): Dang, Phuc T
• Application Number:
  US11/533,332
• Publication Number:
  US 20070069306A1
• Time in Patent Office: 1,281 Days
• Field of Search: 257/360, 257/364, 257/369, 257/379, 257/385, 323/265, 323/266, 323/273, 323/282
• US Class Current: 257/379
• CPC Class Codes: H01L 27/0629 in combination with diodes, or resistors, or capacitors
• CPC Class Codes: H01L 27/0727 in combination with diodes, or capacitors or resistors
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 29/78 with field effect produced by an insulated gate H01L29/7725, H01L29/775, H01L29/778 take precedence
• CPC Class Codes: H03K 19/0005 Modifications of input or output impedance
• CPC Class Codes: H03K 19/0016 by using a control or a clock signal, e.g. in order to apply power supply
• CPC Class Codes: H03K 19/00361 in field effect transistor circuits

Abstract

An apparatus and method of manufacture for metal-oxide semiconductor (MOS) transistors is disclosed. Devices in accordance with the invention are operable at voltages below 2V. The devices are area efficient, have improved drive strength, and have reduced leakage current. A dynamic threshold voltage control scheme comprised of a forward biased diode in parallel with a capacitor is used, implemented without changing the existing MOS technology process. This scheme controls the threshold voltage of each transistor. In the OFF state, the magnitude of the threshold voltage of the transistor increases, keeping the transistor leakage to a minimum. In the ON state, the magnitude of the threshold voltage decreases, resulting in increased drive strength. The invention is particularly useful in MOS technology for both bulk and silicon on insulator (SOI) CMOS. The use of reverse biasing of the well, in conjunction with the above construct to further decrease leakage in a MOS transistor, is also shown.

Claims

1. An apparatus for reducing leakage current and increasing drive current in a metal-oxide-semiconductor (MOS) transistor having a source terminal, a drain terminal, a gate terminal, and a well terminal, said apparatus comprising:

a control circuit comprised of at least a forward biased diode formed in an isolated structure connected between said gate terminal and said well terminal of said MOS transistor;

wherein said control circuit effects an increase in the magnitude of the threshold voltage of said MOS transistor when said MOS transistor is in an OFF state and a decrease in the magnitude of the threshold voltage in said MOS transistor when said MOS transistor is in an ON state.

2. The apparatus of claim 1, wherein said control circuit controls a waveform at said well terminal.

3. The apparatus of claim 1, said MOS transistor comprising any of:

an n-channel device; and

a p-channel device.

4. The apparatus of claim 3, further comprising:

a biasing circuit for providing a positive bias to the well of said n-channel device.

5. The apparatus of claim 3, further comprising:

a biasing circuit for providing a negative bias to the well of said p-channel device.

6. The apparatus of claim 1, further comprising:

a circuit comprising at least two n-channel devices having their respective drain terminals connected.

7. The apparatus of claim 6, further comprising:

a biasing circuit for providing a positive bias to the well of said n-channel devices.

8. The apparatus of claim 7, wherein said at least two n-channel devices connected in parallel reside in the same P-well.

9. The apparatus of claim 8, said circuit comprising at least a portion of a logic gate.

10. The apparatus of claim 1, further comprising:

a circuit comprising at least two p-channel devices having their respective drain terminals connected.

11. The apparatus of claim 10, further comprising:

a biasing circuit for providing a positive bias to the well of said n-channel device.

12. The apparatus of claim 11, wherein said at least two p-channel devices connected in parallel reside in the same N-well.

13. The circuit of claim 10, said circuit comprising at least a portion of a logic gate.

14. The apparatus of claim 1, said control circuit comprising:

at least a capacitor connected in parallel to said at least a forward biased diode.

15. The apparatus of claim 1, said first circuit element further comprising a resistor in series with said at least a forward biased diode.

16. The apparatus of claim 14, further comprising:

a resistor in series with said a capacitor.

17. The apparatus of claim 1, said control circuit comprising of any of:

a diffused diode, a self-aligned diode, an in-line polysilicon diode, and a Schottky diode.

18. The apparatus of claim 17, said polysilicon diode comprising a uniform implant and an opposite heavy implant.

19. The apparatus of claim 1, said MOS transistor comprising a well doping, wherein said well duping is optimized to reduce said leakage current.

20. The apparatus of claim 19, comprising an amount of said well doping that is higher than that used for a standard MOS process.

35. The apparatus of claim 1, further comprising:

a circuit comprising at least two p-channel devices connected in parallel.

36. The apparatus of claim 35, further comprising:

means for providing a positive bias to the well of said n-channel device.

37. The apparatus of claim 36, wherein said at least two p-channel devices connected in parallel reside in the same N-well.

38. The circuit of claim 35, said circuit comprising at least a portion of a logic gate.

21. An apparatus for reducing leakage current and increasing drive current in a metal-oxide-semiconductor (MOS) transistor having a source terminal, a drain terminal, a gate terminal, and a well terminal, said apparatus comprising:

a control circuit comprising a first circuit element comprising at least one forward biased diode, said first circuit element connected between said gate terminal and said well terminal of said MOS transistor;

said control circuit further comprising a second circuit element connected in parallel with said first circuit element, said second circuit element comprising at least a capacitor;

said control circuit effecting an increase in the magnitude of the threshold voltage of said MOS transistor when said MOS transistor is in an OFF state, and a decrease of the magnitude of the threshold voltage in said MOS transistor when said MOS transistor is in an ON state, and controlling a waveform at said well terminal of said MOS transistor; and

said MOS transistor comprising any of an n-channel device and a p-channel device.

22. The apparatus of claim 21, further comprising:

means for providing a positive bias to the well of said n-channel device.

23. The apparatus of claim 21, further comprising:

means for providing a negative bias to the well of said p-channel device.

24. The apparatus of claim 21, said first circuit element further comprising:

a resistor in series with said diode.

25. The apparatus of claim 21, said second circuit element further comprising:

a resistor in series with said capacitor.

26. The apparatus of claim 21, further comprising:

a well for said MOS transistor, wherein said well is doped to a level that optimizes said leakage current.

27. An apparatus for reducing leakage current and increasing drive current in a metal-oxide-semiconductor (MOS) transistor having a source terminal, a drain terminal, a gate terminal, and a well terminal, said apparatus comprising:

a control circuit comprised of at least a forward biased diode formed in an isolated structure connected between said gate terminal and said well terminal of said MOS transistor, and wherein said control circuit controls a waveform at said well terminal;

wherein said control circuit effects an increase in the magnitude of the threshold voltage of said MOS transistor when said MOS transistor is in an OFF state and a decrease of the magnitude of the threshold voltage in said MOS transistor when said MOS transistor is in an ON state.

28. The apparatus of claim 27, said MOS transistor comprising any of:

an n-channel device; and

a p-channel device.

29. The apparatus of claim 28, further comprising:

means for providing a positive bias to the well of said n-channel device.

30. The apparatus of claim 28, further comprising:

means for providing a negative bias to the well of said p-channel device.

31. The apparatus of claim 28, further comprising:

a circuit comprising at least two n-channel devices connected in parallel.

32. The apparatus of claim 31, the logic gate further comprising:

means for providing a positive bias to the well of said n-channel devices.

33. The apparatus of claim 32, wherein said at least two n-channel devices connected in parallel reside in the same P-well.

34. The apparatus of claim 33, said circuit comprising at least a portion of a logic gate.

39. The apparatus of claim 27, said control circuit comprising:

at least a capacitor connected in parallel to said at least a forward biased diode.

40. The apparatus of claim 27, said first circuit element further comprising a resistor in series with said at least a forward biased diode.

41. The apparatus of claim 39, further comprising:

a resistor in series with said a capacitor.

42. The apparatus of claim 27, said control circuit comprising of any of:

a diffused diode, a self-aligned diode, an in-line polysilicon diode, and a Schottky diode.

43. The apparatus of claim 42, said polysilicon diode comprising a uniform implant and an opposite heavy implant.

44. The apparatus of claim 27, said MOS transistor comprising a well doping, wherein said well duping is optimized to reduce said leakage current.

45. The apparatus of claim 44, comprising an amount of said well doping that is higher than that used for a standard MOS process.

46. An apparatus for reducing leakage current and increasing drive current in a metal-oxide-semiconductor (MOS) transistor having a source terminal, a drain terminal, a gate terminal, and a well terminal, said apparatus comprising:

a control circuit comprising a first circuit element comprising at least one forward biased diode, said first circuit element connected between said gate terminal and said well terminal of said MOS transistor;

said control circuit further comprising a second circuit element connected in parallel with said first circuit element, said second circuit element comprising at least a capacitor;

said control circuit effecting an increase in the magnitude of the threshold voltage of said MOS transistor when said MOS transistor is in an OFF state, and a decrease in the magnitude of the threshold voltage of said MOS transistor when said MOS transistor is in an ON state, and controlling a waveform at said well terminal of said MOS transistor;

said MOS transistor comprising any of an n-channel device and a p-channel device; and

a means for providing one of;

a positive bias to the well of said n-channel device; and

a negative bias to the well of said p-channel device.

47. The apparatus of claim 46, said first circuit element further comprising:

a resistor in series with said diode.

48. The apparatus of claim 46, said second circuit element further comprising:

a resistor in series with said capacitor.

49. The apparatus of claim 46, further comprising:

a well for said MOS transistor, wherein said well is doped to a level that optimizes said leakage current.