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Fiber optic seismic sensor based on MEMS cantilever

  • US 7,684,051 B2
  • Filed: 04/18/2007
  • Issued: 03/23/2010
  • Est. Priority Date: 04/18/2006
  • Status: Active Grant
First Claim
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1. An apparatus for measuring seismic movement comprising:

  • a sensor having;

    a wafer;

    a frame attached to said wafer;

    a cantilevered mass pivotally connected to the frame, the cantilevered mass having two beams, on the same side of the cantilevered mass, for pivoting the cantilevered mass relative to the frame; and

    a cavity located between the cantilevered mass and the wafer wherein the cantilevered mass is capable of moving to change the size of the cavity.

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