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Micro-electromechanical microshutter array

  • US 7,684,101 B2
  • Filed: 10/11/2007
  • Issued: 03/23/2010
  • Est. Priority Date: 10/11/2007
  • Status: Active Grant
First Claim
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1. A microshutter array comprising a frame having a single opening that includes a light transmissive portion;

  • a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across a width of the light transmissive portion and first and second torsion arms extending outwards from each side of the blade in the length direction and connected to the frame; and

    at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

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