Micro-electromechanical microshutter array

• US 7,684,101 B2
• Filed: 10/11/2007
• Issued: 03/23/2010
• Est. Priority Date: 10/11/2007
• Status: Active Grant

• Current Assignee: Omnivision Technologies Incorporated (Will Semiconductor Co., Ltd. Shanghai)
• Original Assignee: Eastman Kodak Company
• Inventors: Boysel, Robert M., Lee, J. Kelly, Border, John N., Kowarz, Marek W., Erhardt, Herbert J.
• Primary Examiner(s): MARTINEZ, JOSEPH P
• Application Number:
  US11/870,465
• Publication Number:
  US 20090097095A1
• Time in Patent Office: 894 Days
• Field of Search: 359/204.3, 359/223.1, 359/224.1, 359/224.2, 359/246, 359/247, 359/290, 359/291, 359/292
• US Class Current: 359/224.1
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 7/04 Networks or arrays of similar microstructural devices
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Claims

1. A microshutter array comprising a frame having a single opening that includes a light transmissive portion;

a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across a width of the light transmissive portion and first and second torsion arms extending outwards from each side of the blade in the length direction and connected to the frame; and

at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

2. The microshutter array of claim 1, wherein the light transmissive portion is a transparent material.

3. The microshutter array of claim 2, wherein the at least one electrode associated with each linear microshutter element is formed with the transparent material.

4. The microshutter array of claim 3, wherein the at least one electrode associated with each linear microshutter element extends at least partially across the width of the light transmissive portion.

5. The microshutter array of claim 1, wherein the light transmissive portion is hollow.

6. The microshutter array of claim 1, wherein the frame is silicon or quartz.

7. The microshutter array of claim 1, wherein the flat blade allows light transmission through the light transmissive portion in an unactuated position and blocks light transmission when actuated.

8. The microshutter array of claim 1 further comprising a voltage source switchably connected to the at least one electrode.

9. The microshutter array of claim 1, wherein the at least one electrode is transparent.

10. The microshutter array of claim 1, wherein each liner microshutter element is individually actuable.

11. The microshutter array of claim 1, wherein at least a portion of the at least one electrode lies in a plane that is orthogonal relative to the path of light transmitted through the array.

12. The microshutter array of claim 1, wherein the microshutter element is formed from a material taken from the group consisting of silicon, gold, copper, aluminum, and nickel.

13. The microshutter array of claim 1, wherein the at least one electrode has a raised portion nearest its associated liner microshutter element.

14. The microshutter array of claim 1, wherein the at least one electrode is formed on the surface of the frame that faces the plurality of linear microshutter elements.

15. The microshutter array of claim 1, wherein each microshutter element is at the same electrical potential.

16. The microshutter array of claim 1 being formed onto a single substrate.

17. The microshutter array of claim 1, wherein lenslets are used to direct light between the microshutter elements.

18. The microshutter array of claim 1, wherein the plurality of linear microshutter elements form a one-dimensional array.

19. A method for forming an image of a scene comprising:

providing an image-forming lens for directing light to a sensor having an array of pixel elements arranged in rows;

disposing a microshutter array between the image-forming lens and the sensor wherein the microshutter array includes a plurality of linear microshutter elements each comprising a flat blade extended in a length direction across a width of a light transmissive portion and spanning one or more rows of pixel elements; and

actuating one or more microshutter elements in the microshutter array for exposing associated rows of pixel elements to the light.

20. The method of claim 19 further comprising:

resetting the pixel elements in at least one row to begin an exposure;

actuating a first group having one or more microshutter elements during a first time period; and

actuating a second group having one or more microshutter elements during a second time period.

21. The method of claim 20, wherein actuating the first and second group further comprises providing similar exposure time periods for the different rows.

22. The method of claim 20, wherein actuating the first and second group further comprises providing different exposure time periods for the different rows.

23. The method of claim 20, wherein actuating the first and second group further comprises selecting exposure times for the different rows based on aspects of the scene being imaged.

24. The method of claim 20 further comprising interlacing the first group and the second group of microshutter elements.

25. The method of claim 20, wherein actuating the first group comprises actuating a single microshutter element.

26. The method of claim 20, wherein actuating the second group comprises actuating a single microshutter element.

27. An imaging module, comprising:

an imaging sensor comprising an array of pixels arranged in rows; and

a microshutter array positioned over the array of pixels, wherein the microshutter array comprises;

a frame having a single opening that includes a light transmissive portion extending across the array of pixels;

a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across a width of the light transmissive portion and spanning one or more rows of pixels in the array and first and second torsion arms extending outwards from each side of the blade in the length direction and connected to the frame; and

at least one electrode associated with each linear microshutter element.

28. The imaging module of claim 27, wherein the at least one electrode associated with each linear microshutter element is extended in the length direction parallel to the microshutter element.