Nanoindenter

• US 7,685,869 B2
• Filed: 03/13/2007
• Issued: 03/30/2010
• Est. Priority Date: 03/13/2006
• Status: Active Grant

• Current Assignee: Oxford Instruments Afm Inc, Oxford Instruments PLC
• Original Assignee: Asylum Research Corporation (Oxford Instruments PLC)
• Inventors: Proksch, Roger, Cleveland, Jason, Sauter, Tim, Bonilla, Flavio Alejandro
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US11/724,067
• Publication Number:
  US 20070227236A1
• Time in Patent Office: 1,113 Days
• Field of Search: 73/78, 73/81, 73/82, 731/05
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 2203/0078 using indentation
• CPC Class Codes: G01N 3/317 generated by electromagnetic means
• CPC Class Codes: G01Q 60/366 Nanoindenters, i.e. wherein the indenting force is measured

Abstract

A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Claims

1. A nanoindenter, comprising:

a module installed in an atomic force microscope which includes an actuator that is operable to actuate an indenter probe and an optical lever detection system that is operable to measure the motion of a flexure controlling the indenter probe;

an indenter probe attached to a central shaft of a monolithic threedimensional leaf spring flexure which constrains the motion of such probe to the axis perpendicular to a sample; and

a mechanical converter assembly which converts a z-axis motion of such central shaft to an angular change which is operable to measure such optical lever detection system.