Integrated circuit using complementary junction field effect transistor and MOS transistor in silicon and silicon alloys

• US 7,687,834 B2
• Filed: 11/03/2008
• Issued: 03/30/2010
• Est. Priority Date: 10/28/2005
• Status: Expired due to Fees

• Current Assignee: Mie Fujitsu Semiconductor Ltd (United Microelectronics Corporation)
• Original Assignee: SuVolta, Inc.
• Inventors: Kapoor, Ashok K.
• Primary Examiner(s): Nguyen, Dao H
• Application Number:
  US12/263,854
• Publication Number:
  US 20090057727A1
• Time in Patent Office: 512 Days
• Field of Search: 257/192, 257/256, 257/274, 257/348, 257/407, 257/412
• US Class Current: 257/256
• CPC Class Codes: H01L 21/2257 the applied layer being silicon or silicide or SIPOS, e.g. polysilicon, porous silicon
• CPC Class Codes: H01L 27/0611 integrated circuits having a two-dimensional layout of components without a common active region
• CPC Class Codes: H01L 27/098 the components being PN junction gate field-effect transistors
• CPC Class Codes: H01L 29/41783 Raised source or drain electrodes self aligned with the gate
• CPC Class Codes: H01L 29/456 on silicon
• CPC Class Codes: H01L 29/66492 with a pocket or a lightly doped drain selectively formed at the side of the gate
• CPC Class Codes: H01L 29/66901 with a PN homojunction gate
• CPC Class Codes: H01L 29/7833 with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's for thin film transistors H01L29/78618
• CPC Class Codes: H01L 29/808 with a PN junction gate , e.g. PN homojunction gate H01L29/7725, H01L29/775, H01L29/778, H01L29/806 take precedence

Abstract

This invention describes a method of building complementary logic circuits using junction field effect transistors in silicon. This invention is ideally suited for deep submicron dimensions, preferably below 65 nm. The basis of this invention is a complementary Junction Field Effect Transistor which is operated in the enhancement mode. The speed-power performance of the JFETs becomes comparable with the CMOS devices at sub-70 nanometer dimensions. However, the maximum power supply voltage for the JFETs is still limited to below the built-in potential (a diode drop). To satisfy certain applications which require interface to an external circuit driven to higher voltage levels, this invention includes the structures and methods to build CMOS devices on the same substrate as the JFET devices.

Claims

1. A junction field effect transistor (JFET), comprising:

a source region of a first conductivity type;

a drain region of the first conductivity type which is spaced apart from the source region;

a channel region of the first conductivity type which is located between the source and drain regions, wherein the channel region has a maximum length of less than 100 nm;

a gate region of a second conductivity type which is formed on top of the channel region;

a gate electrode region of the second conductivity type which overlays the gate region, wherein the gate electrode region comprises a high band gap material; and

wherein the high band gap material facilitates a faster switching speed and lower power consumption of the JFET as compared to a different JFET that does not use the high band gap material in the gate electrode region.

2. The JFET of claim 1, wherein the high band gap material comprises silicon carbide.

3. The JFET of claim 1, wherein the high band gap material comprises silicon-germanium carbide.

4. The JFET of claim 1, wherein the high band gap material comprises one of 3C, 4H, and 6H phases of silicon-carbide.

5. The JFET of claim 1, wherein the high band gap material comprises various compound semiconductors selected from the group of gallium, aluminum, arsenide, and phosphide.

6. The JFET of claim 1, wherein the high band gap material increases a forward bias voltage at a gate-to-channel junction, so that a higher power supply voltage can be applied to the JFET resulting in the faster switching speed.

7. The JFET in claim 6, wherein the higher power supply voltage comprises about 0.65 volts as compared to 0.5 volts for the different JFET that does not use the high band gap material in the gate electrode region.

8. The JFET of claim 1, wherein the high band gap material reduces the leakage current of a gate-to-channel junction, when a gate-channel diode is weakly forward biased during the ON state of the JFET, resulting in lower power dissipation.

9. The junction field effect transistor of claim 1, wherein the gate electrode region is substantially aligned with the gate region.

10. The junction field effect transistor of claim 1, wherein the channel region is substantially aligned with the gate region.

11. The junction field effect transistor of claim 1, wherein the channel region is substantially aligned with the gate electrode region.

12. The JFET of claim 1, wherein the alignment of the gate region with the gate electrode region reduces the capacitance of the junction field effect transistor.

13. The JFET of claim 1, wherein the channel region and the gate region are formed in a well region comprised in a substrate;

the well region comprising the second conductivity type;

the substrate comprising the first conductivity type.

14. The JFET of claim 1, wherein the channel region and the gate region are formed in an epitaxially deposited layer of high mobility material comprising silicon-germanium alloy.

15. The JFET of claim 1, wherein the JFET comprising an enhancement-mode transistor.

16. The JFET of claim 1, further comprising:

a source electrode region of the first conductivity type which overlays the source region; and

a drain electrode region of the first conductivity type which overlays the drain region;

the source and drain electrode regions comprising the high band gap material.

17. The junction field effect transistor of claim 16, wherein the source electrode region, the drain electrode region, and the gate electrode region have substantially coplanar surfaces.

18. The JFET of claim 17, further comprising:

a gate contact region, formed on the gate electrode region and in ohmic contact with the gate region;

a source contact region, formed on the source electrode region and in ohmic contact with the source region; and

a drain contact region, formed on the drain electrode region and in ohmic contact with the drain region;

wherein the gate, source, and drain contact regions comprise silicide.

19. The JFET of claim 1, wherein:

the source region comprises a first source portion and a second source portion; and

the first source portion connects the second source portion and the channel region.

20. The JFET of claim 19, wherein the first source portion has an impurity concentration that is doped independently of the second source portion.

21. The JFET of claim 20, wherein the first drain portion has an impurity concentration that is doped independently of the second drain portion.

22. The JFET of claim 1, wherein:

the drain region comprises a first drain portion and a second drain portion; and

the first drain portion connects the second drain portion and the channel region.

23. A junction field effect transistor, comprising:

a semiconductor substrate;

a source region of a first conductivity type which is formed in the substrate;

a drain region of the first conductivity type which is formed in the substrate and spaced apart from the source region;

a channel region of the first conductivity type which is located between the source and drain regions, wherein the channel region has a maximum length of less than 100 nm;

a gate electrode region of a second conductivity type which overlays the semiconductor substrate, wherein at least a portion of the gate electrode region comprises a polycrystalline alloy comprising at least silicon and carbon; and

a gate region of the second conductivity type which is formed in the substrate.

24. The junction field effect transistor of claim 23, wherein the polycrystalline alloy further comprises germanium.

25. The junction field effect transistor of claim 23, wherein the polycrystalline alloy comprises one of 3C, 4H, and 6H phases of silicon-carbide.

26. The junction field effect transistor of claim 23, wherein the polycrystalline alloy of the gate electrode region increases the forward bias voltage at a p-n junction formed at an interface between the gate region and the channel region.

27. The junction field effect transistor of claim 23, wherein the gate electrode region comprises a plurality of polycrystalline alloy layers.

28. The junction field effect transistor of claim 23, further comprising:

a source electrode region of the first conductivity type which overlays the semiconductor substrate and comprises polycrystalline silicon; and

a drain electrode region of the first conductivity type which overlays the semiconductor substrate and comprises polycrystalline silicon.

29. The junction field effect transistor of claim 28, wherein at least a portion of the source region comprises impurities that were diffused from the source electrode region.

30. The junction field effect transistor of claim 28, wherein at least a portion of the drain region comprises impurities that were diffused from the drain electrode region.

31. The junction field effect transistor of claim 28, wherein at least a portion of the source electrode region comprises a polycrystalline alloy comprising at least silicon and carbon.

32. The junction field effect transistor of claim 28, wherein at least a portion of the drain electrode region comprises a polycrystalline alloy comprising at least silicon and carbon.

33. The junction field effect transistor of claim 28, further comprising a source contact region formed on the source electrode region and in ohmic contact with the source region.

34. The junction field effect transistor of claim 28, further comprising a drain contact region formed on the drain electrode region and in ohmic contact with the drain region.

35. The junction field effect transistor of claim 23, wherein the gate electrode region is substantially aligned with the gate region.

36. The junction field effect transistor of claim 35, wherein the alignment of the gate region with the gate electrode region reduces a capacitance of the JFET.

37. The junction field effect transistor of claim 23, wherein a length of the gate region is less than seventy nanometers.

38. The junction field effect transistor of claim 23, wherein the channel region is substantially aligned with the gate region.

39. The junction field effect transistor of claim 23, wherein a length of the channel is less than seventy nanometers.

40. The junction field effect transistor of claim 23, wherein:

the first conductivity type comprises n-type; and

the second conductivity type comprises p-type.

41. The junction field effect transistor of claim 23, wherein:

the first conductivity type comprises p-type; and

the second conductivity type comprises n-type.

42. The junction field effect transistor of claim 23, further comprising a well region formed in the semiconductor substrate;

wherein;

the source region, the drain region, the gate region, and the channel region are formed in the well region;

the semiconductor substrate comprises the first conductivity type; and

the well region comprises the second conductivity type.

43. The junction field effect transistor of claim 42, further comprising an insulating region formed in the semiconductor substrate and surrounding at least a portion of the well region.

44. The junction field effect transistor of claim 23, further comprising a gate contact region formed on the gate electrode region and in ohmic contact with the gate region.

45. The junction field effect transistor of claim 23, wherein at least one of the channel region and the gate region are formed of epitaxially deposited silicon-germanium alloy material or epitaxially deposited silicon-germanium-carbide alloy material.

46. The junction field effect transistor of claim 23, wherein the transistor comprises an enhancement-mode transistor.

47. The junction field effect transistor of claim 23, wherein the gate region comprises impurities that were diffused from the gate electrode region.

48. The junction field effect transistor of claim 23, wherein the polycrystalline alloy further comprises at least one of:

gallium, aluminum, arsenide, and phosphide.

49. An electronic circuit comprising one or more devices wherein at least one device in the electronic circuit comprises a junction field effect transistor that comprises:

a source region of a first conductivity type;

a drain region of the first conductivity type which is spaced apart from the source region;

a channel region of the first conductivity type which is located between the source and drain regions, wherein the channel region has a maximum length of less than 100 nm;

a gate region of a second conductivity type which is formed on top of the channel region;

a gate electrode region of the second conductivity type which overlays the gate region, wherein the gate electrode region comprises a high band gap material; and

wherein the high band gap material facilitates a faster switching speed and lower power consumption of the JFET as compared to a different JFET that does not use the high band gap material in the gate electrode region.

50. The electronic circuit of claim 49, wherein the high band gap material comprises silicon carbide.

51. The electronic circuit of claim 49, wherein the high band gap material comprises silicon-germanium-carbide.

52. The electronic circuit of claim 49, wherein the high band gap material comprises one of 3C, 4H, and 6H phases of silicon-carbide.

53. The electronic circuit of claim 49, wherein the high band gap material comprises various compound semiconductors selected from the group of gallium, aluminum, arsenide, and phosphide.

54. The electronic circuit of claim 49, wherein the high band gap material increases a forward bias voltage at a gate-to-channel junction, so that a higher power supply voltage can be applied to the JFET resulting in the faster switching speed.

55. The electronic circuit in claim 54, wherein the higher power supply voltage comprises about 0.65 volts as compared to 0.5 volts for the different JFET that does not use the high band gap material in the gate electrode region.

56. The electronic circuit of claim 49, wherein the high band gap material reduces the leakage current of a gate-to-channel junction, when a gate-channel diode is weakly forward biased during the ON state of the JFET, resulting in lower power dissipation.

57. The electronic circuit of claim 49, wherein the JFET comprising an enhancement-mode transistor.