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Chuck with integrated wafer support

  • US 7,688,091 B2
  • Filed: 03/10/2008
  • Issued: 03/30/2010
  • Est. Priority Date: 12/24/2003
  • Status: Expired due to Fees
First Claim
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1. A probe station comprising:

  • (a) a chuck assembly having an upper surface suitable to support a wafer thereon and movable in a direction substantially parallel to said upper surface from a first chuck position to a second chuck position; and

    (b) a plurality of members located within a periphery of said chuck assembly suitable to support said wafer;

    said members moveable with respect to said upper surface so as to be capable of relative vertical movement with respect to said upper surface;

    a range of vertical movement of at least one of said members relative to said upper surface variable as a consequence of said position of said chuck relative to said first chuck position.

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