Electrode and interconnect materials for MEMS devices
First Claim
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1. A microelectromechanical system (MEMS) device, comprising:
- a conductor comprising a metallized semiconductor layer; and
a movable element configured to be actuated by the conductor,wherein the metallized semiconductor layer is partially reflective, electrically conductive, and configured to transmit light towards the movable element.
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Abstract
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.
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Citations
24 Claims
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1. A microelectromechanical system (MEMS) device, comprising:
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a conductor comprising a metallized semiconductor layer; and a movable element configured to be actuated by the conductor, wherein the metallized semiconductor layer is partially reflective, electrically conductive, and configured to transmit light towards the movable element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 22)
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15. A method of using a microelectromechanical system (MEMS) device, comprising:
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applying a voltage to a conductor comprising a metallized semiconductor layer, wherein a movable element is actuated in response to the voltage; and partially transmitting light, partially reflecting light, and conducting electricity with the metallized semiconductor layer. - View Dependent Claims (16, 17, 23)
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18. A method of manufacturing a microelectromechanical system (MEMS) device, the method comprising:
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forming a conductor comprising a metallized semiconductor layer; and forming a movable element configured to be actuated by the conductor, wherein the metallized semiconductor layer is partially reflective, electrically conductive, and configured to transmit light towards the movable element. - View Dependent Claims (19, 20, 21, 24)
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Specification