Method and apparatus for evaluating processing apparatus status and predicting processing result
First Claim
1. A method for predicting a processing result, comprising:
- a process of performing a predetermined first standard processing on a plurality of objects to be processed with use of a first processing apparatus set in a certain condition;
a process of obtaining a plurality of detected data from a plurality of detectors provided at the first processing apparatus during the first standard processing;
a process of performing a principal component analysis on the plurality of detected data obtained during the first standard processing, to construct a principal component analysis model;
a process of obtaining residuals of the principal component analysis model as first residuals;
a process of performing a second standard processing, which is similar to the first standard processing, on a plurality of objects to be processed, which are similar to said the plurality of objects to be processed, with use of the first processing apparatus in another condition or another second processing apparatus of the same kind;
a process of obtaining a plurality of detected data from the plurality of detectors provided at the first processing apparatus or from a plurality of detectors provided at the second processing apparatus during the second standard processing;
a process of applying the plurality of detected data obtained during the second standard processing to the principal component analysis model, to obtain second residuals;
a process of selecting from the obtained second residuals those of the second residuals within a maximum and a minimum of the first residuals;
a process of weighting the selected second residuals, and constructing a new multivariate analysis model with use of the selected second residuals; and
a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.
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Abstract
A method for predicting a processing result includes a process of performing a principal component analysis on a plurality of detected data obtained during a first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing; and a process of obtaining a plurality of detected data from a plurality of detectors during the second standard processing. And, the detected data obtained during the second standard processing are applied to the principal component analysis model, to obtain second residuals. The method further includes a process of weighting the second residuals based on weighting references, and constructing a new multivariate analysis model with use of the weighted second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model.
21 Citations
22 Claims
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1. A method for predicting a processing result, comprising:
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a process of performing a predetermined first standard processing on a plurality of objects to be processed with use of a first processing apparatus set in a certain condition; a process of obtaining a plurality of detected data from a plurality of detectors provided at the first processing apparatus during the first standard processing; a process of performing a principal component analysis on the plurality of detected data obtained during the first standard processing, to construct a principal component analysis model; a process of obtaining residuals of the principal component analysis model as first residuals; a process of performing a second standard processing, which is similar to the first standard processing, on a plurality of objects to be processed, which are similar to said the plurality of objects to be processed, with use of the first processing apparatus in another condition or another second processing apparatus of the same kind; a process of obtaining a plurality of detected data from the plurality of detectors provided at the first processing apparatus or from a plurality of detectors provided at the second processing apparatus during the second standard processing; a process of applying the plurality of detected data obtained during the second standard processing to the principal component analysis model, to obtain second residuals; a process of selecting from the obtained second residuals those of the second residuals within a maximum and a minimum of the first residuals; a process of weighting the selected second residuals, and constructing a new multivariate analysis model with use of the selected second residuals; and a process of predicting a processing result of the second standard processing with use of the multivariate analysis model. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 21)
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14. An apparatus for predicting a processing result, comprising:
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a unit for, while performing a predetermined first standard processing on a plurality of objects to be processed with use of a first processing apparatus set in a certain condition, performing a principal component analysis on a plurality of detected data obtained from a plurality of detectors provided at the first processing apparatus, to construct a principal component analysis model; a unit for obtaining residuals of the principal component analysis model as first residuals; a unit for, while performing a second standard processing, which is similar to the first standard processing, on a plurality of objects to be processed, which are similar to said the plurality of objects to be processed, with use of the first processing apparatus in another condition or another second processing apparatus of the same kind, applying a plurality of detected data, obtained from the plurality of detectors provided at the first processing apparatus or from a plurality of detectors provided at the second processing apparatus, to the principal component analysis model, to obtain second residuals; a unit for selecting from the obtained second residuals those of the second residuals within a maximum and a minimum of the first residuals; a unit for weighting the second residuals, and constructing a new multivariate analysis model with use of the selected second residuals; and a unit for predicting a processing result of the second standard processing with use of the multivariate analysis model. - View Dependent Claims (15, 16, 17, 18, 19, 20, 22)
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Specification