×

System and method for model-based scoring and yield prediction

  • US 7,689,948 B1
  • Filed: 02/24/2007
  • Issued: 03/30/2010
  • Est. Priority Date: 02/24/2007
  • Status: Active Grant
First Claim
Patent Images

1. A computer implemented method for model-based yield prediction, comprising:

  • using a processor configured for performing;

    predicting a physical realization of a layout design based at least in part on one or more model parameters;

    determining one or more hotspots associated with the layout design;

    determining a score for each of the one or more hotspots based at least in part on a yield information;

    categorizing the one or more hotspots according to at least the score; and

    using a computer readable storage medium or a computer storage device configured for storing at least the score or using a display apparatus configured for displaying at least the score.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×