System and method for model-based scoring and yield prediction
First Claim
1. A computer implemented method for model-based yield prediction, comprising:
- using a processor configured for performing;
predicting a physical realization of a layout design based at least in part on one or more model parameters;
determining one or more hotspots associated with the layout design;
determining a score for each of the one or more hotspots based at least in part on a yield information;
categorizing the one or more hotspots according to at least the score; and
using a computer readable storage medium or a computer storage device configured for storing at least the score or using a display apparatus configured for displaying at least the score.
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Abstract
Methods and systems for the integration of models and accurate predictions to score the circuit design, which translates to a more accurate and less complex yield prediction. In the present inventive approach, the computer-implemented methods and systems use at least one processor that is configured for performing at least predicting a physical realization of a layout design based at least in part on one or more model parameters, determining one or more hotspots associated with the layout design, determining a score for each of the one or more hotspots associated with the layout design, and categorizing the one or more hotspots according to at least the score in some embodiments. In some embodiments, the methods or the systems further use at least one processor for the act of determining one or more hotspots by using at least the design intent or the manufacturing information.
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Citations
20 Claims
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1. A computer implemented method for model-based yield prediction, comprising:
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using a processor configured for performing; predicting a physical realization of a layout design based at least in part on one or more model parameters; determining one or more hotspots associated with the layout design; determining a score for each of the one or more hotspots based at least in part on a yield information; categorizing the one or more hotspots according to at least the score; and using a computer readable storage medium or a computer storage device configured for storing at least the score or using a display apparatus configured for displaying at least the score. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A computer system for predicting model-based yield comprising:
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a processor configured for performing; predicting a physical realization of a layout design based at least in part on one or more model parameters; determining one or more hotspots associated with the layout design; calculating a score for each of the one or more hotspots based at least in part on a predicted yield; and categorize the one or more hotspots according to at least the score. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A computer program product embodied in a tangible computer readable storage medium having executable code which, when executed by a processor, causes the processor to execute a process for model-based yield prediction, the process comprising:
using a processor configured for performing; predicting a physical realization of a layout design based at least in part on one or more model parameters; determining one or more hotspots associated with the layout design; calculating a score for each of the one or more hotspots based at least in part on a predicted yield; and categorize the one or more hotspots according to at least the score. - View Dependent Claims (18, 19, 20)
Specification