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Methods, systems, and carrier media for evaluating reticle layout data

  • US 7,689,966 B2
  • Filed: 09/14/2005
  • Issued: 03/30/2010
  • Est. Priority Date: 09/14/2004
  • Status: Active Grant
First Claim
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1. A computer-implemented method for evaluating reticle layout data, comprising:

  • using a computer system to perform steps of;

    generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process;

    comparing the simulated image to the reticle layout data; and

    identifying areas in the reticle layout data in which the features will not be formed correctly on the reticle.

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