Methods, systems, and carrier media for evaluating reticle layout data
First Claim
1. A computer-implemented method for evaluating reticle layout data, comprising:
- using a computer system to perform steps of;
generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process;
comparing the simulated image to the reticle layout data; and
identifying areas in the reticle layout data in which the features will not be formed correctly on the reticle.
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Abstract
Various computer-implemented methods are provided. One method for evaluating reticle layout data includes generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process. The simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process. The method also includes determining manufacturability of the reticle layout data using the simulated image. The manufacturability is a measure of how accurately the features will be formed on the reticle. Also provided are various carrier media that include program instructions executable on a computer system for performing a method for evaluating reticle layout data as described herein. In addition, systems configured to evaluate reticle layout data are provided. The systems include a computer system and a carrier medium that includes program instructions executable on the computer system for performing method(s) described herein.
361 Citations
31 Claims
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1. A computer-implemented method for evaluating reticle layout data, comprising:
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using a computer system to perform steps of; generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; comparing the simulated image to the reticle layout data; and identifying areas in the reticle layout data in which the features will not be formed correctly on the reticle. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A storage medium, comprising program instructions executable on a computer system for performing a method for evaluating reticle layout data, wherein the method comprises:
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generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; comparing the simulated image to the reticle layout data; and identifying areas in the reticle layout data in which the features will not be formed correctly on the reticle.
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31. A system configured to evaluate reticle layout data, comprising:
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a computer system; and a storage medium comprising program instructions executable on the computer system for; generating a simulated image using the reticle layout data as input to a model of a reticle manufacturing process, wherein the simulated image illustrates how features of the reticle layout data will be formed on a reticle by the reticle manufacturing process; comparing the simulated image to the reticle layout data; and identifying areas in the reticle layout data in which the features will not be formed correctly on the reticle.
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Specification