Method for improved growth of semipolar (Al,In,Ga,B)N

• US 7,691,658 B2
• Filed: 01/19/2007
• Issued: 04/06/2010
• Est. Priority Date: 01/20/2006
• Status: Active Grant

• Current Assignee: Japan Science & Technology Trading Co. Limited
• Original Assignee: Japan Science & Technology Trading Co. Limited, Regents of the University of California (University of California)
• Inventors: Lee, Dong-Seon, Speck, James S., Kaeding, John F., Baker, Troy J., DenBaars, Steven P., Haskell, Benjamin A., Nakamura, Shuji, Sato, Hitoshi, Iza, Michael
• Primary Examiner(s): Ghyka; Alexander G
• Assistant Examiner(s): Chang; Leonard
• Application Number:
  US11/655,573
• Publication Number:
  US 20070218703A1
• Time in Patent Office: 1,173 Days
• Field of Search: 438/22, 438/36, 438/41, 438/44, 438/46, 438/48, 438/481, 438/485, 257/12, 257/13, 257/79, 257/86, 257/94, 257/103, 257/E21.113, 257/E21.121, 257/E21.463
• US Class Current: 438/46
• CPC Class Codes: C30B 23/025 characterised by the substrate
• CPC Class Codes: C30B 25/02 Epitaxial-layer growth
• CPC Class Codes: C30B 25/18 characterised by the substrate
• CPC Class Codes: C30B 25/183 being provided with a buffer layer, e.g. a lattice matching layer
• CPC Class Codes: C30B 29/403 AIII-nitrides
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: H01L 21/02378 Silicon carbide
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/02433 Crystal orientation
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 33/007 comprising nitride compounds

Abstract

A method for improved growth of a semipolar (Al,In,Ga,B)N semiconductor thin film using an intentionally miscut substrate. Specifically, the method comprises intentionally miscutting a substrate, loading a substrate into a reactor, heating the substrate under a flow of nitrogen and/or hydrogen and/or ammonia, depositing an In_xGa_1−xN nucleation layer on the heated substrate, depositing a semipolar nitride semiconductor thin film on the In_xGa_1−xN nucleation layer, and cooling the substrate under a nitrogen overpressure.

Claims

1. A method for improved growth of a semipolar nitride semiconductor film comprising:

(a) depositing a semipolar nitride semiconductor film on a miscut substrate, wherein a growth surface of the semipolar nitride semiconductor film is more than 10 microns wide and substantially parallel to the miscut substrate'"'"'s surface.

2. The method of claim 1, wherein the substrate is miscut away from a low index crystal orientation.

3. The method of claim 1, wherein the miscut has a magnitude and direction.

4. The method of claim 3, wherein the direction and magnitude of the miscut are chosen to affect at least one of the following properties of the semipolar nitride semiconductor thin film:

the epitaxial relationship, crystal symmetry, layer polarity, dislocation density, surface morphology and electrical properties.

5. The method of claim 3, wherein the magnitude of the miscut varies depending on the substrate material, an orientation of the semipolar nitride semiconductor thin film, a type of deposition, and deposition conditions.

6. The method of claim 3, wherein the magnitude of the miscut is a miscut angle that ranges from 0.5°

-20°

.

7. The method of claim 6, wherein the magnitude of the miscut is a miscut angle that preferably varies from 0.5°

-3°

.

8. The method of claim 1, wherein a substrate for growth of the semipolar nitride semiconductor film is miscut in a given crystallographic direction, thereby forming the miscut substrate and lowering a symmetry of the substrate to match the semipolar nitride semiconductor film'"'"'s symmetry.

9. The method of claim 8, wherein the semipolar nitride semiconductor film contains a single crystallographic domain.

10. The method of claim 8, wherein the low symmetry semipolar nitride semiconductor film is deposited heteroepitaxially on the higher symmetry substrate.

11. The method of claim 1, wherein the semipolar nitride semiconductor film comprises an alloy composition of (Ga,Al,In,B)N semiconductors having a formula Ga_nAl_xIn_yB_zN where 0≦

n≦

1, 0≦

x≦

1, 0≦

y≦

1, 0≦

z≦

1 and n+x+y+z=1.

12. The method of claim 1, wherein the semipolar nitride semiconductor film is {10-11} gallium nitride and the miscut substrate is a {100} MgAl₂O₄ spinel substrate miscut in the <

011>

direction.

13. The method of claim 1, wherein the semipolar nitride semiconductor film is {11-22} gallium nitride and the miscut substrate is a {1-100} Al₂O₃ sapphire substrate miscut in the <

0001>

direction.

14. The method of claim 1, wherein the miscut substrate is obtained by cutting a bulk nitride crystal along a semipolar plane and growing the semipolar nitride semiconductor thin film homoepitaxially on the miscut substrate.

15. The method of claim 14, wherein the semipolar plane'"'"'s exposed surface has a Nitrogen face.

16. The method of claim 1, wherein the miscut substrate provides step edges or kinks that serve as preferential nucleation sites for growth of the semipolar nitride semiconductor thin film.

17. The method of claim 16, wherein the preferential nucleation sites provide for improved layer properties, such as better coalescence of nuclei, reduced defect densities or smoother, more planar interfaces or surfaces as compared to deposition on non miscut substrates.

18. The method of claim 1, wherein the semipolar nitride semiconductor thin film deposited on the miscut substrate has better crystallinity and reduced threading dislocations as compared to a semipolar nitride semiconductor thin film deposited on a non miscut substrate.

19. The method of claim 2, wherein macroscopic surface roughness and faceting of the semipolar nitride semiconductor film decreases with increasing miscut angle.

20. The method of claim 1, further comprising:

(1) miscutting a substrate;

(2) loading the substrate into a reactor;

(3) heating the substrate under a flow comprising at least one of nitrogen, hydrogen or ammonia;

(4) depositing the semipolar nitride semiconductor thin film on the heated substrate; and

(5) cooling the substrate under a nitrogen overpressure.

21. The method of claim 20, wherein the depositing step (4) comprises:

(i) depositing a nucleation layer on the heated substrate; and

(ii) depositing the semipolar nitride semiconductor thin film on the nucleation layer.

22. A device fabricated using the method of claim 1.

23. The device of claim 22, wherein the device is a light emitting diode having a brighter emission than a device fabricated on a non-miscut substrate.

24. The device of claim 22, wherein the miscut substrate controls a relative orientation of a total polarization field in the device.

26. The method of claim 1, wherein the semipolar nitride semiconductor film is deposited heteroepitaxially on the miscut substrate and the miscut substrate is a different material from gallium nitride.

25. A method for improved growth of a lower symmetry layer on a higher symmetry substrate comprising:

(a) miscutting a higher symmetry substrate to match a symmetry of a lower symmetry layer; and

(b) depositing the lower symmetry layer heteroepitaxially on the miscut higher symmetry substrate.