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Electrode layer for capacitors, method of manufacturing the electrode layer, unit sensor using the electrode layer, and tactile sensor using the unit sensor

  • US 7,692,255 B2
  • Filed: 01/23/2006
  • Issued: 04/06/2010
  • Est. Priority Date: 05/26/2005
  • Status: Active Grant
First Claim
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1. A unit sensor comprising:

  • an upper electrode layer including a polymer substrate, an upper electrode embeddedly formed in the center of the polymer substrate in a relatively wide width, and a signal transmission line embeddedly formed in the polymer substrate in a relatively narrow width such that the signal transmission line extends in the side-to-side direction of the upper electrode;

    a lower electrode layer including a polymer substrate, a lower electrode embeddedly formed in the center of the polymer substrate in a relatively wide width, and a signal transmission line embeddedly formed in the polymer substrate in a relatively narrow width such that the signal transmission line extends in the front-to-rear direction of the lower electrode;

    a spacer layer, made of polymer, disposed between the upper electrode layer and the lower electrode layer, the spacer layer being provided at a corresponding position surrounding the upper electrode and the signal transmission line of the upper electrode layer and having an opening, through which the upper electrode and the lower electrode face each other without blocking of the spacer; and

    a bump layer, made of polymer, disposed on the upper electrode layer and having a bump at its center.

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