Sawing tile corners on probe card substrates

• US 7,692,433 B2
• Filed: 06/16/2006
• Issued: 04/06/2010
• Est. Priority Date: 06/16/2006
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: FormFactor Incorporated
• Inventors: Mathews, Peter B., Henson, Roy J., Hobbs, Eric D., Eldridge, Benjamin N., Shinde, Makarand S.
• Primary Examiner(s): Nguyen; Vinh P
• Application Number:
  US11/455,110
• Publication Number:
  US 20070290705A1
• Time in Patent Office: 1,390 Days
• Field of Search: None
• US Class Current: 324/754.07
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A composite substrate for testing semiconductor devices is formed by selecting a plurality of substantially identical individual substrates, cutting a corner from at least some of the individual substrates in accordance with their position in a final array configuration, and then assembling the individual substrates into the final array configuration. The final array configuration of substrates with corners cut or sawed away conforms more closely to the surface area of a wafer being tested, and can easily fit within space limits of a test environment.

Claims

1. A probe card assembly for testing a semiconductor wafer comprising:

a plurality of individual substrates each comprising a plurality of probes configured to contact dies of the semiconductor wafer and first electrically conductive internal paths connected to the probes, the individual substrates arranged in an away having an outer perimeter;

an electrical interface connectable to a tester configured to control testing of the dies; and

electrical connections between the electrical interface and the first electrically conductive internal paths of the individual substrate,

wherein at least one of the individual substrates has a shape that comprises three approximately ninety degree angles and two obtuse angles, and a first edge of the individual substrate between the two obtuse angles is part of the outer perimeter of the array,

wherein the first edge comprises a cut line wherein ones of the first electrically conductive internal paths are spaced apart from the cut line, and

wherein a second plurality of electrically conductive internal paths are not connected to the probes and extend to the cut line.

2. The probe card of claim 1, wherein each of the at least one of the individual substrates has a second edge between one of the obtuse angles and a first one of the approximately ninety degree angles, a third edge between the first one of the approximately ninety degree angles and a second one of the approximately ninety degree angles, a fourth edge between the second one of the approximately ninety degree angles and a third one of the approximately ninety degree angles, and a fifth edge between the third one of the approximately ninety degree angles and another of the obtuse angles.

3. The probe card of claim 1, further comprising:

a support fixture for holding the individual substrates, wherein the first edge of each of the at least one individual substrates between the two obtuse angles is part of the outer periphery of the array.

4. The probe card of claim 1, further comprising:

a support structure for holding the individual substrates in the array.

5. The probe card of claim 4, wherein:

the outer perimeter is an octagon shape, the octagon shape being a square or rectangular shape with four missing corners, and

the octagon shape fits into a generally round predetermined area that the square or rectangular shape would not fit into.

6. The probe card of claim 5, wherein the predetermined area is a surface area of the wafer.

7. The probe card of claim 5, further comprising:

a prober for holding the support structure, the prober having an opening through which the array of the individual substrates pass, wherein the predetermined area is an area of the opening.

8. The probe card of claim 1, wherein the probes comprise lithographically formed compliant contacts.

9. A probe substrate for use in a probe card assembly for testing a semiconductor wafer comprising:

a substrate;

a plurality of probes disposed on the substrate and configured to contact dies of the semiconductor wafer;

a cut line extending from a first edge of the substrate to a second edge of the substrate, the cut line defining a removable corner of the probe substrate;

a plurality of electrically conductive internal traces disposed in the substrate and connected to the plurality of probes;

wherein first ones of the plurality of electrically conductive internal traces are connected to ones of the plurality of probes disposed within the removable corner and the first ones of the plurality of electrically conductive internal traces cross the cut line; and

wherein second ones of the plurality of electrically conductive internal traces are connected to ones of the plurality of probes not disposed within the removable corner and the second ones of the plurality of electrically conductive internal traces do not cross the cut line.

10. The probe substrate of claim 9, further comprising:

a second cut line extending from a third edge to a fourth edge of the substrate, the cut line defining a second removable corner of the probe substrate;

wherein third ones of the plurality of electrically conductive internal traces are connected to ones of the plurality of probes disposed within the second removable corner and the third ones of the plurality of electrically conductive internal traces cross the second cut line; and

wherein four ones of the plurality of electrically conductive internal traces are connected to ones of the plurality of probes not disposed within the second removable corner and the fourth ones of the plurality of electrically conductive internal traces do not cross the second cut line.

11. The probe substrate of claim 9, further comprising a marking disposed along the cut line.

12. The probe substrate of claim 9, wherein the removable corner is detached at the cut line.

13. The probe substrate of claim 9, wherein the probes comprise lithographically formed compliant contacts.