Medium frequency power generator
First Claim
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1. An MF power generator for induction heating or a plasma process, the MF power generator comprising:
- a DC current supply;
an inverter comprising at least one switching element connected to a first polarity current supply potential of the DC current supply; and
an output network connected to the inverter;
wherein the inverter comprises a decoupling circuit for each switching element for decoupling the switching element from a voltage of the output network;
wherein the decoupling circuit comprises;
a first component connected in series between the switching element and an input terminal of the output network; and
a second component connected between the switching element or the input terminal of the output network and a limiting potential differing from the first polarity current supply potential.
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Abstract
An MF power generator includes a DC current supply connected to an inverter. The inverter includes at least one switching element connected to a first-polarity current supply potential, and an output network. Each switching element is provided with a decoupling circuit for decoupling the switching element from a voltage of the output network. This enables the low-loss switching of the switching elements.
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Citations
25 Claims
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1. An MF power generator for induction heating or a plasma process, the MF power generator comprising:
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a DC current supply; an inverter comprising at least one switching element connected to a first polarity current supply potential of the DC current supply; and an output network connected to the inverter; wherein the inverter comprises a decoupling circuit for each switching element for decoupling the switching element from a voltage of the output network; wherein the decoupling circuit comprises; a first component connected in series between the switching element and an input terminal of the output network; and a second component connected between the switching element or the input terminal of the output network and a limiting potential differing from the first polarity current supply potential. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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- 19. A method for controlling and/or regulating the power of an MF power generator comprising an inverter that includes at least one activatable switching element and an output network, the method comprising operating the switching element in a pulse width modulation method such that the switching element is at least largely decoupled from a voltage of the output network, in that a current direction reversal of the current between the switching element and the output network is prevented.
Specification