Diagnostics for mass flow control
First Claim
1. A flow control system comprising:
- a flow sensor configured to generate a sensor signal characterizing a flow rate;
a valve controller configured to control the flow rate as a function of a control output;
a signal processor configured to convert the sensor signal into a flow signal characterizing the flow rate as a function of time;
a control processor configured to generate the control output as a function of a setpoint and the flow signal; and
an interface configured to receive an input representative of the setpoint and to transmit a flow output representative of the flow signal, flow diagnostic indicative of an operational condition of the flow control system and a control diagnostic indicative of an operational condition of the flow controller;
wherein the flow diagnostic is based on an inverse signal-to-noise ratio of a standard deviation of the flow signal to a mean of the flow signal, and the control diagnostic is based on a response function relating the control output to at least one of the setpoint and the flow signal.
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Accused Products
Abstract
A flow control system comprises a flow sensor, a valve controller, a signal processor, a control processor and an interface. The flow sensor generates a sensor signal characterizing a flow rate. The valve controller controls the flow rate as a function of a control output. The signal processor converts the sensor signal into a flow signal characterizing the flow rate as a function of time, and the control processor generates the control output as a function of a setpoint and the flow signals. The interface receives an input representative of the setpoint, transmits a flow output representative of the flow signals, and transmits a diagnostic output directly indicative of an operational condition of the flow control system.
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Citations
22 Claims
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1. A flow control system comprising:
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a flow sensor configured to generate a sensor signal characterizing a flow rate; a valve controller configured to control the flow rate as a function of a control output; a signal processor configured to convert the sensor signal into a flow signal characterizing the flow rate as a function of time; a control processor configured to generate the control output as a function of a setpoint and the flow signal; and an interface configured to receive an input representative of the setpoint and to transmit a flow output representative of the flow signal, flow diagnostic indicative of an operational condition of the flow control system and a control diagnostic indicative of an operational condition of the flow controller; wherein the flow diagnostic is based on an inverse signal-to-noise ratio of a standard deviation of the flow signal to a mean of the flow signal, and the control diagnostic is based on a response function relating the control output to at least one of the setpoint and the flow signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A flow controller comprising a flow sensor for generating an analog sensor signal;
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an analog-to-digital converter for converting the analog sensor signal to a digital sensor signal; a digital-to-analog converter for converting a digital control signal to an analog control output; a valve controller for controlling a valve as a function of the analog control output; a microprocessor for generating a flow signal as a function of the digital sensor signal, for generating the digital control signal as a function of a setpoint and the flow signal, and for generating first and second diagnostic signals indicative of an operational condition of the flow controller, wherein the first diagnostic signal is based on an inverse signal-to-noise ratio of a standard deviation of the flow signal to a mean of the flow signal and the second diagnostic signal is based on a response function relating the control output to at least one of the setpoint and the flow signal; and an interface for receiving an input representative of the setpoint and for transmitting an output representative of the flow signal and the first and second diagnostic signals. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of flow control, the method comprising:
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generating a flow signal that characterizes a process flow rate as a function of time; receiving an input representative of a setpoint for the process flow rate; controlling the process flow rate as a function of a response function relating the setpoint and the flow signal; generating a flow diagnostic signal that is indicative of an operational condition of the process flow rate, wherein the flow diagnostic signal is based on an inverse signal-to-noise ratio of a standard deviation of the flow signal to a mean of the flow signal; generating a control diagnostic signal that is indicative of the operational condition of the process flow rate, wherein the control diagnostic signal is based on the response function; and transmitting an output that is representative of the flow signal, the flow diagnostic signal and the control diagnostic signal. - View Dependent Claims (21, 22)
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Specification