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Diagnostics for mass flow control

  • US 7,693,606 B2
  • Filed: 12/21/2007
  • Issued: 04/06/2010
  • Est. Priority Date: 12/21/2007
  • Status: Active Grant
First Claim
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1. A flow control system comprising:

  • a flow sensor configured to generate a sensor signal characterizing a flow rate;

    a valve controller configured to control the flow rate as a function of a control output;

    a signal processor configured to convert the sensor signal into a flow signal characterizing the flow rate as a function of time;

    a control processor configured to generate the control output as a function of a setpoint and the flow signal; and

    an interface configured to receive an input representative of the setpoint and to transmit a flow output representative of the flow signal, flow diagnostic indicative of an operational condition of the flow control system and a control diagnostic indicative of an operational condition of the flow controller;

    wherein the flow diagnostic is based on an inverse signal-to-noise ratio of a standard deviation of the flow signal to a mean of the flow signal, and the control diagnostic is based on a response function relating the control output to at least one of the setpoint and the flow signal.

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