Controller and method to mediate data collection from smart sensors for fab applications

• US 7,693,687 B2
• Filed: 12/04/2006
• Issued: 04/06/2010
• Est. Priority Date: 04/07/2004
• Status: Expired due to Fees

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Attwood, Mark, Lev-Ami, Uzi, Sifnatsch, Guenter
• Primary Examiner(s): BHAT, ADITYA S
• Application Number:
  US11/566,632
• Publication Number:
  US 20070150235A1
• Time in Patent Office: 1,219 Days
• Field of Search: 700/100, 700/108, 700/109, 700/110, 700/111, 700/117, 700/118, 700/119, 700/120, 700/121, 702/186
• US Class Current: 702/186
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32181 Monitor production, assembly apparatus with multiple sensors
• CPC Class Codes: G05B 2219/37494 Intelligent sensor, data handling incorporated in sensor
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G05B 23/0221 Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Claims

1. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:

sending from the controller to a smart sensor configuration data keyed to at least one context identifier, whereby the smart sensor is adapted to modify sensing of data responsive to receipt of a context identifier key;

recognizing in the controller a current context of operation of a manufacturing device that is monitored by the smart sensor;

transmitting to the smart sensor the context identifier key for the current context; and

receiving from the smart sensor data sensed by the smart sensor, responsive to the context identifier key.

2. The method of claim 1, wherein the configuration data includes specifications for the smart sensor to calibrate its dynamic range and transmitting the context identifier key to the smart senor triggers the calibration without need to reiterate the dynamic range.

3. The method of claim 1, wherein the configuration data includes specifications for the smart sensor to reduce sampled data before reporting the reduced data and transmitting the context identifier key triggers the reduction of data without need to reiterate the data reduction specifications.

4. The method of claim 3, further including:

analyzing the reduced data and determining that additional detail should be requested;

transmitting to the smart sensor a request for the additional detail from the data sensed; and

receiving from the smart sensor the additional detail requested, responsive to the request.

5. The method of claim 1, wherein the current context of operation is an operating recipe being executed by the manufacturing device.

6. The method of claim 1, wherein the current context of operation is a step in an operating recipe being executed by the manufacturing device.

7. A controller adapted to monitoring equipment performance in a semiconductor manufacturing operation, the controller including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with smart sensors; and

logic and resources operable with the processor, adapted to

send to a smart sensor configuration data keyed to at least one context identifier, whereby the smart sensor is adapted to modify sensing of data responsive to receipt of a context identifier key;

recognize a current context of operation of a manufacturing device that is monitored by the smart sensor;

transmit to the smart sensor the context identifier key for the current context; and

receive from the smart sensor data sensed by the smart sensor, responsive to the context identifier key.

8. A controller-aided method of monitoring processes or equipment performance in a semiconductor manufacturing operation, the method including:

receiving from the controller in a smart sensor configuration data keyed to at least one context identifier;

receiving from the controller in the smart sensor the context identifier key for the current context to which the sensing of data is to be adapted; and

selecting the configuration data corresponding to the context identifier key, sensing data according to the corresponding configuration, and transmitting at least part of the sensed data to the controller.

9. The method of claim 8, wherein the configuration data includes specifications for the smart sensor to calibrate its dynamic range and receiving the context identifier key to the smart senor triggers the calibration based on the configuration data.

10. The method of claim 8, wherein the configuration data includes specifications for the smart sensor to reduce sampled data before reporting the reduced data and receiving the context identifier key triggers the reduction of data based on the configuration data.

11. The method of claim 10, further including:

persisting additional sampled data, in addition to the reduced data and organizing it for retrieval;

receiving from the controller in the smart sensor a request for at least some of the additional data; and

sending the controller from the smart sensor the additional data requested.

12. The method of claim 8, wherein the current context of operation is an operating recipe being executed by the manufacturing device.

13. The method of claim 8, wherein the current context of operation is a step in an operating recipe being executed by the manufacturing device.

14. A smart sensor adapted to monitoring manufacturing equipment performance responsive to a current context identifier key received from a controller, the smart sensor including:

a processor;

memory coupled to the processor;

one or more ports coupled to the processor, adapted to communicate with at least one controller; and

logic and resources operable with the processor, adapted to

receive from the controller configuration data keyed to at least one context identifier;

receive from the controller the context identifier key for the current context to which the controller is directing for the sensing of data to be adapted; and

select the configuration data corresponding to the context identifier key, sensing data according to the corresponding configuration, and transmitting at least part of the sensed data to the controller.