Method for process window optimized optical proximity correction

• US 7,694,267 B1
• Filed: 02/02/2007
• Issued: 04/06/2010
• Est. Priority Date: 02/03/2006
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Brion Technologies Incorporated (ASML Holding NV)
• Inventors: Hunsche, Stefan, Ye, Jun, Li, Jiangwei
• Primary Examiner(s): WHITMORE, STACY
• Application Number:
  US11/670,848
• Time in Patent Office: 1,159 Days
• Field of Search: 716 19- 21
• US Class Current: 716/53
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G06F 30/00 Computer-aided design [CAD]

Abstract

One embodiment of a method for process window optimized optical proximity correction includes applying optical proximity corrections to a design layout, simulating a lithography process using the post-OPC layout and models of the lithography process at a plurality of process conditions to produce a plurality of simulated resist images. A weighted average error in the critical dimension or other contour metric for each edge segment of each feature in the design layout is determined, wherein the weighted average error is an offset between the contour metric at each process condition and the contour metric at nominal condition averaged over the plurality of process conditions. A retarget value for the contour metric for each edge segment is determined using the weighted average error and applied to the design layout prior to applying further optical proximity corrections.

Claims

1. A method comprising:

obtaining a design layout including features, each feature including edge segments;

applying optical proximity corrections to the design layout to produce a first post-OPC layout;

simulating, using a computer executing model-based OPC software, a lithography process using the first post-OPC layout and a plurality of models of the lithography process at a plurality of process conditions to produce a plurality of simulated resist images;

determining a simulated resist contour for each edge segment of each feature of the design layout in each of the plurality of simulated resist images;

determining a weighted average error in a contour metric for each edge segment over the plurality of process conditions, wherein the error in the contour metric is an offset between the contour metric at each of the plurality of process conditions and the contour metric at nominal condition;

determining a retarget value for the contour metric for each edge segment using the weighted average error;

applying each retarget value to the corresponding edge to produce a retargeted layout; and

applying optical proximity corrections to the retargeted layout to produce a second post-OPC layout.

2. The method of claim 1, wherein the contour metric is critical dimension.

3. The method of claim 1, wherein the contour metric is edge placement error.

4. The method of claim 1, wherein each of the plurality of models includes an optical model component and a resist model component.

5. The method of claim 1, wherein the plurality of process conditions comprises three process conditions including best focus and best exposure dose and two process conditions at corner points of a process window.

6. The method of claim 1, wherein the plurality of process conditions includes one or more of focus, exposure dose, film thickness, reflectivity, numerical aperture, illumination, lens aberrations, resist bake temperature, resist development time, and etch time.

7. The method of claim 1, wherein determining a retarget value includes performing a numerical analysis of a local mask error factor.

8. The method of claim 1, wherein determining a retarget value includes performing a numerical analysis of a normalized image log slope.

9. A method comprising:

obtaining a design layout including features, each feature including edge segments;

applying optical proximity corrections to the design layout to produce a first post-OPC layout;

simulating using a computer executing model-based OPC software a lithography process using the first post-OPC layout and a model of the lithography process at a plurality of process conditions to produce a plurality of simulated resist images, wherein the model of the lithography process was calibrated over all of the plurality of process conditions;

determining a simulated resist contour for each edge segment of each feature of the design layout in each of the plurality of simulated resist images;

determining a weighted average error in a contour metric for each edge segment over the plurality of process conditions, wherein the error in the contour metric is an offset between the contour metric at each of the plurality of process conditions and the contour metric at nominal condition;

determining a retarget value for the contour metric for each edge segment using the weighted average error;

applying each retarget value to the corresponding edge segment to produce a retargeted layout; and

applying optical proximity corrections to the retargeted layout to produce a second post-OPC layout.

10. The method of claim 9, wherein the contour metric is critical dimension.

11. The method of claim 9, wherein the contour metric is edge placement error.

12. The method of claim 9, wherein the model of the lithography process includes an optical model component and a resist model component.

13. The method of claim 10, wherein the plurality of process conditions comprises three process conditions including best focus and best exposure dose and two process conditions at corner points of a process window.

14. The method of claim 9, wherein the plurality of process conditions includes one or more of focus, exposure dose, film thickness, reflectivity, numerical aperture, illumination, lens aberrations, resist bake temperature, resist development time, and etch time.

15. The method of claim 9, wherein determining a retarget value includes performing a numerical analysis of a local mask error factor.

16. The method of claim 9, wherein determining a retarget value includes performing a numerical analysis of a normalized image log slope.