Cantilevered probe detector with piezoelectric element

• US 7,694,346 B2
• Filed: 09/30/2005
• Issued: 04/06/2010
• Est. Priority Date: 10/01/2004
• Status: Active Grant

• Current Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Original Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Inventors: Feigin, Stuart C., Adams, Jesse D., Sulchek, Todd A.
• Primary Examiner(s): Berman; Jack I
• Assistant Examiner(s): Sahu; Meenakshi S
• Application Number:
  US11/576,443
• Publication Number:
  US 20080085212A1
• Time in Patent Office: 1,649 Days
• Field of Search: 250/234, 250/288, 422/50, 422/82.01, 422/68.01, 436/183, 436/164, 850/9, 850/10, 850/57, 850/59
• US Class Current: 850/7
• CPC Class Codes: G01N 2291/0257 with a layer containing at least one organic compound
• CPC Class Codes: G01N 25/00 Investigating or analyzing materials by the use of thermal means G01N3/00 - G01N23/00 take precedence
• CPC Class Codes: G01N 27/007 by investigating the electric dipolar moment measuring piezoelectric properties G01R29/22
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27
• CPC Class Codes: G01N 33/0057 for warfare agents or explosives properties of explosives G01N33/227
• CPC Class Codes: G01N 33/227 Explosives, e.g. combustive properties thereof detecting explosives in air G01N33/0057

Abstract

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Claims

1. A chemical detection system for detecting a target material, comprising:

a cantilevered probe;

a probe heater thermally coupled to the cantilevered probe; and

a piezoelectric element disposed on the cantilevered probe, further comprising a detection circuit coupled to the piezoelectric element of the cantilevered probe, wherein the piezoelectric element and detection circuit are configured to detect a movement of the cantilevered probe based on signals generated by the piezoelectric element as it moves.

2. The system of claim 1, wherein the piezoelectric element is configured to detect a temperature change of the cantilevered probe.

3. The system of claim 1, wherein the piezoelectric element is configured to detect an impedance shift of the cantilevered probe.

4. The system of claim 1, wherein the piezoelectric element is configured to detect a resonant frequency shift of the cantilevered probe.

5. The system of claim 1, wherein the piezoelectric element comprises a piezoelectric film disposed on a surface of the cantilevered probe.

6. The system of claim 1, wherein the cantilevered probe is part of a cantilevered probe array.

7. The system of claim 6, wherein a selective coating is disposed on one or more cantilevered probes in the cantilevered probe array.

8. The system of claim 1, wherein the probe heater comprises a piezoresistive element formed in the cantilevered probe, a heater element disposed on the cantilevered probe, or both.

9. The system of claim 1, wherein the piezoelectric element comprises zinc oxide, lead zircanate titanate, aluminum nitride, a piezoelectric material, or a derivative or combination thereof.

10. The system of claim 1, wherein the piezoelectric element comprises a pyroelectric material.

11. The system of claim 1 further comprising:

an interface circuit electrically coupled to the piezoelectric element.

12. The system of claim 1 further comprising:

an interface circuit comprising the piezoelectric element as a bridge element in an AC bridge circuit.

13. The system of claim 12, wherein the AC bridge circuit is tuned to one of an on-resonance condition or an off-resonance condition to detect the target material.

14. The system of claim 6, wherein at least one cantilevered probe in the cantilevered probe away is tuned to an on-resonance condition and at least one other cantilevered probe in the cantilevered probe away is tuned to an off-resonance condition.

15. The system of claim 6, wherein at least two cantilevered probes in the cantilevered probe away are frequency-differentiated.

16. The system of claim 15, wherein piezoelectric elements disposed on the at least two cantilevered probes in the cantilevered probe away are connected in series.