Detachable electrostatic chuck
First Claim
1. A detachable electrostatic chuck capable of attachment to a pedestal in a process chamber, the chuck comprising:
- (a) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface with an annular periphery; and
(b) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the periphery of the ceramic body, the annular flange comprising a plurality of holes to allow connectors to pass therethrough, and wherein the base plate comprises a composite of a ceramic material comprising pores that are at least partially filled by a metal.
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Accused Products
Abstract
An electrostatic chuck is capable of attachment to a pedestal in a process chamber. The chuck has an electrostatic puck comprises a ceramic body with an embedded electrode. The ceramic body has a substrate support surface with an annular periphery. The chuck also has a base plate below the electrostatic puck that is a composite of a ceramic material and a metal. The base plate has an annular flange extending beyond the periphery of the ceramic body. The base plate and electrostatic puck can be supported by a support pedestal having a housing and an annular ledge that extends outwardly from the housing to attach to the annular flange of the base plate. A heat transfer plate having an embedded heat transfer fluid channel can also be provided.
116 Citations
19 Claims
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1. A detachable electrostatic chuck capable of attachment to a pedestal in a process chamber, the chuck comprising:
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(a) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface with an annular periphery; and (b) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the periphery of the ceramic body, the annular flange comprising a plurality of holes to allow connectors to pass therethrough, and wherein the base plate comprises a composite of a ceramic material comprising pores that are at least partially filled by a metal. - View Dependent Claims (2, 3)
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4. An electrostatic chuck assembly comprising:
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(a) a detachable electrostatic chuck comprising; (i) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface and an annular periphery; and (ii) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the annular periphery of the ceramic body, the annular flange comprising a plurality of holes that are shaped and sized to allow connectors to pass therethrough, wherein the base plate comprises a composite comprising a ceramic material comprising pores that are at least partially infiltrated with a metal; and (b) a support pedestal having a housing and an annular ledge, the annular ledge extending outwardly from the housing, wherein the annular ledge is capable of being attached to the annular flange of the base plate by the connectors. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 19)
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13. An electrostatic chuck assembly comprising:
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(a) a detachable electrostatic chuck comprising; (i) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface and an annular periphery; and (ii) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the annular periphery of the ceramic body, the annular flange comprising a plurality of holes that are shaped and sized to allow connectors to pass therethrough, and the base plate comprising a composite comprising a ceramic material infiltrated with a metal; (b) a support pedestal having a housing and an annular ledge, the annular ledge extending outwardly from the housing, the annular ledge being capable of being attached to the annular flange of the base by the connectors; and (c) a heat transfer plate below the base plate, the heat transfer plate having a heat transfer fluid channel comprising first and second spiral channels, the first spiral channel being adapted to provide a flow of fluid therethrough that is substantially opposite a flow of fluid through the second spiral channel. - View Dependent Claims (14, 15, 16, 17)
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18. An electrostatic chuck assembly comprising:
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(a) a detachable electrostatic chuck comprising; (i) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface and an annular periphery; and (ii) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the periphery of the ceramic body, the annular flange comprising a plurality of holes to allow connectors to pass therethrough, and wherein the base plate comprises a composite of a ceramic material comprising pores that are at least partially filled by a metal; (b) a support pedestal having a housing and an annular ledge, wherein the annular ledge extends outwardly from the housing to attach to the annular flange of the base plate, thereby supporting the base plate and electrostatic puck; (c) a heat transfer plate below the base plate and at least partially surrounded by the pedestal housing, the heat transfer plate comprising an embedded heat transfer fluid channel; and (d) a spring assembly at least partially surrounded by the pedestal housing, the spring assembly being biased to press the heat transfer plate against the base plate.
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Specification