×

Detachable electrostatic chuck

  • US 7,697,260 B2
  • Filed: 03/31/2004
  • Issued: 04/13/2010
  • Est. Priority Date: 03/31/2004
  • Status: Active Grant
First Claim
Patent Images

1. A detachable electrostatic chuck capable of attachment to a pedestal in a process chamber, the chuck comprising:

  • (a) an electrostatic puck comprising a ceramic body with an embedded electrode, the ceramic body having a substrate support surface with an annular periphery; and

    (b) a base plate bonded to the electrostatic puck by a bond layer, the base plate having an annular flange extending beyond the periphery of the ceramic body, the annular flange comprising a plurality of holes to allow connectors to pass therethrough, and wherein the base plate comprises a composite of a ceramic material comprising pores that are at least partially filled by a metal.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×