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Sensing unit and method of making same

  • US 7,698,941 B2
  • Filed: 06/20/2007
  • Issued: 04/20/2010
  • Est. Priority Date: 06/20/2007
  • Status: Active Grant
First Claim
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1. A sensing unit comprising:

  • a substrate formed with a recessed portion;

    a spring portion formed from a conductive material and having a support portion provided on said substrate and a flat coil-shaped movable portion supported by said support portion so as to be capable of floating relative to said substrate; and

    a sensor portion provided on said movable portion of said spring portion, for detecting displacement in said movable portion and transmitting a signal relating to said displacement via said spring portion.

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