Method of forming stack layer and method of manufacturing electronic device having the same
First Claim
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1. A method of forming a stacked structure in an electronic material, comprising:
- coating at least one target material layer on a substrate of the electronic material;
forming a mask layer by coating a positive photoresist having a polymer on the substrate, the polymer comprising at least 50 mole % of monomers having a structure selected from the group consisting of Fonnulae 1 to 3;
first baking the mask layer at a first temperature;
exposing the mask layer to light with a predetermined pattern;
second baking the mask layer at a second temperature;
developing the mask layer to form an etch window in the mask layer;
etching the target material layer through the etch window;
repeating at least twice the exposing to the developing; and
removing the mask layer;
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Abstract
A method of forming a stacked structure in an electronic device, where a photoresist for performing multi-patterning processes is used. Also, a method of manufacturing a FED in which different structures can be multi-patterned by using a single photoresist mask. The photoresist has a solubility to a solvent by heat-treatment after exposure, and a complicated structure can be formed using the photoresist.
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Citations
20 Claims
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1. A method of forming a stacked structure in an electronic material, comprising:
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coating at least one target material layer on a substrate of the electronic material; forming a mask layer by coating a positive photoresist having a polymer on the substrate, the polymer comprising at least 50 mole % of monomers having a structure selected from the group consisting of Fonnulae 1 to 3; first baking the mask layer at a first temperature; exposing the mask layer to light with a predetermined pattern; second baking the mask layer at a second temperature; developing the mask layer to form an etch window in the mask layer; etching the target material layer through the etch window; repeating at least twice the exposing to the developing; and removing the mask layer; - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing a field emission device, comprising:
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forming a stacked structure having a substrate, a cathode having a predetermined pattern on the substrate, a gate insulation layer on the cathode, and a gate electrode layer on the gate insulation layer; forming a mask layer by coating a positive photoresist having a polymer on the stacked structure, the polymer comprising at least 50 mole % of monomers having a structure selected from the group consisting of Formulae 1 to 3; first baking the mask layer at a first temperature range; first exposing the mask layer to light with a first pattern; second baking the mask layer at a second temperature range; forming on the mask layer an etch window partially exposing the gate electrode by developing the mask layer; forming a gate hole in the gate electrode layer by etching a portion of the gate electrode layer exposed by the etch window; forming a throughhole in the gate electrode layer by etching a portion of the gate insulation layer; second exposing to light a region including the etch window of the mask layer and having a greater size then the etch window of the mask layer, and baking the second-exposed region at the second temperature range to form an enlarged etch window; enlarging the gate hole by etching a region adjacent to the gate hole in the gate electrode exposed by the second exposure; and removing the mask layer; - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method of patterning layers of a stacked structure in an electronic device, the method comprising:
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forming a photoresist mask layer on the stacked structure having the plural layers, the mask layer comprising a polymer comprising at least 50 o of monomers having a structure selected from the group consisting of Formulae 1 to 3; baking the mask layer at a first temperature range; exposing the mask layer with a first pattern; baking the mask layer at a second temperature range; forming on the mask layer an etch window partially exposing a first layer of the plural layers; forming a first hole in the first layer by etching a portion of the first layer exposed by the etch window; forming a second hole in a second layer formed below the first layer by etching a portion of the second layer; exposing the mask layer to light with a second pattern; baking the region exposed to the light with the second pattern at the second temperature range; and removing the mask layer; - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A method of forming a photoresist mask layer for a multiple patterning of an electronic device, the method comprising;
preparing a composition having a polymer being a positive photoresist, the polymer comprising a monomer having a structure selected from the group consisting of Formulae 1 to 3;
Specification