Position sensing apparatus, and position sensing method

• US 7,701,587 B2
• Filed: 03/24/2006
• Issued: 04/20/2010
• Est. Priority Date: 03/30/2005
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ouchi, Toshihiko, Shioda, Michinori
• Primary Examiner(s): Lee; Hwa (Andrew) S
• Application Number:
  US11/387,729
• Publication Number:
  US 20060227340A1
• Time in Patent Office: 1,488 Days
• Field of Search: 356/486, 356/498
• US Class Current: 356/486
• CPC Class Codes: G01B 9/02004 using frequency scans
• CPC Class Codes: G01B 9/02007 Two or more frequencies or sources used for interferometric measurement using only beat G01B9/02003
• CPC Class Codes: G01B 9/02012 using temporal intensity variation
• CPC Class Codes: G01B 9/02022 contacting one object by grazing incidence
• CPC Class Codes: G01S 17/36 with phase comparison between the received signal and the contemporaneously transmitted signal
• CPC Class Codes: G01S 17/87 Combinations of systems using electromagnetic waves other than radio waves
• CPC Class Codes: G01S 7/4811 common to transmitter and receiver

Abstract

An apparatus for sensing the position of an object includes an irradiation portion for irradiating the object with continuous electromagnetic radiation, a detection portion for detecting electromagnetic radiation reflected by the object, and an output portion for supplying a change in an amplitude intensity or a phase of the electromagnetic radiation based on information obtained by the detection portion. The position of the object is detected based on information supplied from the output portion.

Claims

1. An apparatus for obtaining an amount of movement of an object, said apparatus comprising:

two laser diodes for emitting laser lights;

a beam splitter for mixing laser lights emitted from the two laser diodes to generate at least two mixture beams including a first mixture beam and a second mixture beam;

a photoconductive device for emitting a terahertz electromagnetic wave when irradiated by the first mixture beam;

parabolic mirrors for directing the emitted terahertz electromagnetic wave towards the object, wherein the terahertz electromagnetic wave is reflected by the object;

a photoconductive device for detecting the reflected terahertz electromagnetic wave when irradiated by the second mixture beam; and

a time delaying system including a movable stage for time-delaying the second mixture beam, wherein the movable stage is controlled based on the detected terahertz electromagnetic wave,

wherein when the object is in a first position, a first output in the reflected terahertz electromagnetic wave detected by the photoconductive device for detecting the reflected terahertz electromagnetic wave is obtained,

wherein when the object moves from the first position to a second position, a second output in the reflected terahertz electromagnetic wave detected by the photoconductive device for detecting the reflected terahertz electromagnetic wave is obtained,

wherein when the object is in the second position, the movable stage of the time delaying system is moved such that an output in the reflected terahertz electromagnetic wave detected by the photoconductive device for detecting the reflected terahertz electromagnetic wave changes from the second output to the first output, and

wherein the amount of movement of the object is calculated from an amount of the movement of the movable stage.

2. the apparatus according to claim 1, wherein the terahertz electromagnetic wave emitted by irradiating the photoconductive device for emission with the first mixture beam is a continuous wave.

3. The apparatus according to claim 1, wherein a frequency of the mixture beams is a difference between frequencies of the laser lights, and the frequency of the mixture beams is in a range between 30 GHz and 30 THz.

4. The apparatus according to claim 1, wherein the time delaying system is provided in an optical path for irradiating the photoconductive device for detection with the second mixture beam.

8. The apparatus according to claim 1, wherein the laser diodes can change wavelengths of emitted laser lights.

5. An apparatus for obtaining an amount of movement of an object said apparatus comprising:

two laser units for emitting laser lights

a beam mixture unit for mixing the laser lights emitted from the two laser units to generate at least two mixture beams including a first mixture beam and a second mixture beam, the mixture beams having a frequency equal to a difference between frequencies of the laser lights;

an emitting unit for emitting a terahertz electromagnetic wave by using the first mixture beam, wherein the emitted terahertz electromagnetic wave is towards the object and reflected by the object;

a detecting unit for detecting the reflected terahertz electromagnetic wave by using the second mixture beam; and

a time delaying system including a movable stage for time-delaying the second mixture beam;

wherein when the object is in a first position, a first output in the reflected terahertz electromagnetic wave detected by the detecting unit is obtained,

wherein when the object moves from the first position to a second position, a second output in the reflected terahertz electromagnetic wave detected by the detecting unit is obtained,

wherein when the object is in the second position, the movable stage of the time delaying system is moved such that an output in the reflected terahertz electromagnetic wave detected by the detecting unit changes from the second output to the first output, and

wherein the amount of movement of the object is calculated from an amount of the movement of the movable stage.

6. The apparatus according to claim 5, wherein the information relating to movement stored in the computer is a relationship between the detected terahertz electromagnetic wave and a time delay corresponding to an amount of movement of the moveable stage.

7. The apparatus according to claim 5, wherein the amount of movement of the object is obtained by using an integral value of absolute values or squares of an amplitude of the terahertz electromagnetic wave stored in the computer.