Electrostatic chuck with heater and manufacturing method thereof
First Claim
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1. An electrostatic chuck, comprising:
- a plate-like base that is made of ceramics and has a substrate mounting surface on which a substrate is to be mounted; and
a dielectric electrode embedded in the base,wherein the base includes a support portion made of alumina ceramics, and a surface and side portions that are made of yttria ceramics and form at least the substrate mounting surface of the base on a surface of the base and side surfaces of the base,wherein a carbon content in alumina ceramics in a vicinity of the dielectric electrode is 0.03 wt % or less, andwherein a thickness of a portion of the base, which forms the substrate mounting surface, is 0.2 mm to 0.5 mm, and a thickness of a portion of the base, which forms the side surface of the base, is 0.2 mm to 10 mm.
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Abstract
An electrostatic chuck includes a base. The base has a support portion made of alumina ceramics, and a surface portion made of yttria ceramics. The surface portion forms at least a substrate mounting surface and side surface of the base on a surface of the support portion. Carbon contents in alumina ceramics of the support portion and yttria ceramics of the surface portion are 0.05 wt % or less.
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Citations
9 Claims
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1. An electrostatic chuck, comprising:
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a plate-like base that is made of ceramics and has a substrate mounting surface on which a substrate is to be mounted; and a dielectric electrode embedded in the base, wherein the base includes a support portion made of alumina ceramics, and a surface and side portions that are made of yttria ceramics and form at least the substrate mounting surface of the base on a surface of the base and side surfaces of the base, wherein a carbon content in alumina ceramics in a vicinity of the dielectric electrode is 0.03 wt % or less, and wherein a thickness of a portion of the base, which forms the substrate mounting surface, is 0.2 mm to 0.5 mm, and a thickness of a portion of the base, which forms the side surface of the base, is 0.2 mm to 10 mm. - View Dependent Claims (2, 3, 4, 5)
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6. A manufacturing method of an electrostatic chuck, comprising the steps of:
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forming a plate-like alumina sintered body with a carbon content of 0.03 wt % or less from a raw material of alumina ceramics; forming a dielectric electrode on one surface of the alumina sintered body; forming an yttria member so as to cover the dielectric electrode and the surface and side portions of the alumina sintered body, on which the dielectric electrode is formed; and sintering the alumina sintered body and the yttria member while integrally pressing the alumina sintered body and the yttria member in a uniaxial direction, thereby forming a base with at least the substrate mounting surface and side surfaces of the base being made of yttria ceramics; wherein a thickness of a portion of the base, which forms the substrate mounting surface, is 0.2 mm to 0.5 mm, and a thickness of a portion of the base, which forms the side surface of the base, is 0.2 mm to 10 mm. - View Dependent Claims (7, 8, 9)
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Specification