Micro switch device and manufacturing method
First Claim
1. A micro switch device comprising:
- a switch substrate having an input terminal, an output terminal, a first driving electrode, and a second driving electrode;
an electrostatic cover physically separated from the switch substrate, electrically connected to the second driving electrode to be capable of forming an electrostatic force against the first driving electrode, and having a connection electrode to electrically connect the input terminal with the output terminal; and
a bezel allowing the electrostatic cover to move while limiting a movable area of the electrostatic cover.
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Accused Products
Abstract
A micro switch device includes a switch substrate, an electrostatic cover which is separated from the switch substrate, and a bezel which limits a movable area of the electrostatic cover. An input terminal, an output terminal, a first driving electrode, and a second driving electrode are formed on the switch substrate, and the electrostatic cover is physically separated from the switch substrate. In this instance, since the electrostatic cover is physically separated from the switch substrate, the electrostatic cover is not supported by the switch substrate and is able to move within a range, predetermined by the bezel. The electrostatic cover is electrically connected to the second driving electrode, and is able to easily operate with an electrostatic force at a lower power.
11 Citations
28 Claims
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1. A micro switch device comprising:
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a switch substrate having an input terminal, an output terminal, a first driving electrode, and a second driving electrode; an electrostatic cover physically separated from the switch substrate, electrically connected to the second driving electrode to be capable of forming an electrostatic force against the first driving electrode, and having a connection electrode to electrically connect the input terminal with the output terminal; and a bezel allowing the electrostatic cover to move while limiting a movable area of the electrostatic cover. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A micro switch device comprising:
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a switch substrate having an input terminal, an output terminal, a first driving electrode, and a second driving electrode; a dome shaped electrostatic cover physically separated from the switch substrate, comprising a first insulation layer which faces the first driving electrode and an conductive layer formed on the first insulation layer to be electrically connected to the second driving electrode, wherein a connection electrode is formed on a bottom of the first insulation layer between the input terminal and the output terminal to electrically connect the input terminal and the output terminal; and a bezel circumferentially formed along the electrostatic cover, and spaced apart a predetermined distance from a circumference of the electrostatic cover. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A micro switch device comprising:
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a switch substrate having an input terminal, an output terminal, a first driving electrode, and a second driving electrode; an electrostatic cover formed substantially in a dome shape to be physically separated from the switch substrate, and comprising a first insulation layer which faces the first driving electrode and a conductive layer formed on the first insulation layer to be electrically connected to the second driving electrode, wherein a connection electrode is formed on a bottom of the first insulation layer between the input terminal and the output terminal to electrically connect the input terminal and the output terminal; and a bezel circumferentially formed along the electrostatic cover, and spaced apart a predetermined space from a circumference of the electrostatic cover; and an electrode bridge electrically connecting either the input terminal or the output terminal to the connection electrode. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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24. A micro switch device manufacturing method comprising:
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forming an input terminal, an output terminal, a first driving electrode, and a second driving electrode; forming a first sacrificial layer on a switch substrate; forming an electrostatic cover which has a connection electrode on the switch substrate on which the first sacrificial layer is formed; forming a second sacrificial layer on the electrostatic cover; forming a bezel in a circumference of the second sacrificial layer; and eliminating the first and second sacrificial layers. - View Dependent Claims (25, 26, 27, 28)
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Specification