Scintillator panel and radiation image sensor
First Claim
Patent Images
1. A panel for detection of radiation, comprising:
- a radiation transmitting conductive substrate;
a metal film having a surface that reflects light;
an intermediate film formed of an inorganic non-conductive film provided between and contacting the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate;
a protective film provided on the metal film; and
a converter for converting a radiation image into a visible image.
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Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
31 Citations
1 Claim
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1. A panel for detection of radiation, comprising:
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a radiation transmitting conductive substrate; a metal film having a surface that reflects light; an intermediate film formed of an inorganic non-conductive film provided between and contacting the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate; a protective film provided on the metal film; and a converter for converting a radiation image into a visible image.
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Specification
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Current AssigneeHamamatsu Photonics KK
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Original AssigneeHamamatsu Photonics KK
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InventorsSuzuki, Takaharu, Natsume, Yoshio, Homme, Takuya, Sato, Hiroto, Takabayashi, Toshio
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Primary Examiner(s)Hannaher; Constantine
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Application NumberUS12/213,170Publication NumberTime in Patent Office680 DaysField of Search250/368US Class Current250/368CPC Class CodesG01T 1/202 the detector being a crystal
