Optical interference display cell and method of making the same
First Claim
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1. A microelectromechanical systems (MEMS) device, comprising:
- a first electrode formed over a substrate;
a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity, wherein the second electrode comprises at least one hole extending through the second electrode; and
at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters, and wherein the supporters comprise an inorganic material.
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Abstract
An optical interference display cell is described. A first electrode and a sacrificial layer are sequentially formed on a transparent substrate and at least two openings are formed in the first electrode and the sacrificial layer to define a position of the optical interference display cell. An insulated heat-resistant inorganic supporter is formed in each of the openings. A second electrode is formed on the sacrificial layer and the supporters. Finally, a remote plasma etching process is used for removing the sacrificial layer.
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Citations
12 Claims
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1. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate; a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity, wherein the second electrode comprises at least one hole extending through the second electrode; and at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters, and wherein the supporters comprise an inorganic material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate; a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity, wherein the second electrode comprises at least one hole extending through the second electrode; and at least two inorganic supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters.
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11. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate; a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity, wherein the second electrode comprises at least one hole extending through the second electrode; and at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters, and wherein the MEMS device comprises an optical interference display cell.
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12. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate; a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity, wherein the second electrode comprises at least one hole extending through the second electrode; and at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters, and wherein the supporters each extend through an opening in the first electrode.
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Specification