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Capacitance manometers and methods relating to auto-drift correction

  • US 7,706,995 B2
  • Filed: 04/16/2007
  • Issued: 04/27/2010
  • Est. Priority Date: 04/16/2007
  • Status: Active Grant
First Claim
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1. A capacitance manometer comprising:

  • a sensor capsule with a first port and a second port;

    a diaphragm disposed within the sensor capsule, wherein the diaphragm has two sides and is configured and arranged to move within the sensor capsule in response to a pressure difference between respective pressures on the two sides of the diaphragm;

    an electrode structure disposed within the sensor capsule adjacent to one side of the diaphragm; and

    an electronic circuit configured and arranged to (i) measure capacitance between the diaphragm and the electrode structure, (ii) produce a zero-output reading corresponding to a measured zero pressure, (iii) record two or more time stamps, each corresponding to a respective zero-output reading, and (iv) predict a future drift value of the manometer zero-output reading based on the two or more time stamps and the respective zero-output readings.

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