Compliant base to increase contact for micro- or nano-fibers
First Claim
Patent Images
1. A fabricated microstructure, comprising:
- a substrate;
a primary fiber having a width less than about 5 microns; and
a plurality of base fibers, each base fiber having a first end attached to the primary fiber and a second end attached to the substrate, wherein each base fiber has a width less than the width of the primary fiber.
2 Assignments
0 Petitions
Accused Products
Abstract
A fabricated microstructure includes a substrate, a primary fiber, and a plurality of base fibers. The primary fiber has a width less than about 5 microns. Each base fiber of the plurality of base fibers has a first end attached to the primary fiber and a second end attached to the substrate. Each base fiber has a width less than the width of the primary fiber.
-
Citations
22 Claims
-
1. A fabricated microstructure, comprising:
-
a substrate; a primary fiber having a width less than about 5 microns; and a plurality of base fibers, each base fiber having a first end attached to the primary fiber and a second end attached to the substrate, wherein each base fiber has a width less than the width of the primary fiber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A method of fabricating a microstructure having a plurality of micro- or nano-fibers attached to a compliant substrate, comprising:
-
stacking a first porous mold on a second porous mold, wherein the first and second porous molds have different pore sizes, and wherein the first and second porous molds are shaped to form a plurality of primary fibers, each primary fiber having a width less than about 5 microns, and each primary fiber having a plurality of base fibers, wherein each base fiber has a width less than the width of the primary fiber; filling the stacked first and second porous molds with polymer; curing the polymer; after curing the polymer, etching away the first and second porous molds; and cutting the polymer using a cutting beam.
-
-
13. A fabricated microstructure, comprising:
-
a substrate; and a micro- or nano-fiber having a base attached to the substrate, wherein the fiber has a width less than about 5 microns, wherein the base includes a first structure, and wherein the first structure comprises two parallel sides separated by a gap, wherein the first structure permits compliance of the fiber at the base in a first direction perpendicular to the two parallel sides of the first structure. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
-
Specification