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Structure of a micro electro mechanical system and the manufacturing method thereof

  • US 7,709,964 B2
  • Filed: 10/26/2007
  • Issued: 05/04/2010
  • Est. Priority Date: 09/30/2003
  • Status: Expired due to Fees
First Claim
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1. A pre-release structure configured to form an optical interference display cell upon removal of a sacrificial layer, the pre-release structure comprising:

  • a first electrode;

    a sacrificial layer;

    a first material layer; and

    a conductor layer comprising a light reflective surface;

    wherein;

    the sacrificial layer is positioned between the first electrode and the first material layer;

    the first material layer is positioned between the sacrificial layer and the conductor layer;

    the conductor layer is susceptible to etching by an etchant suitable to remove the sacrificial layer;

    the first material layer is adapted to protect the light reflective layer from etching when the sacrificial layer is removed using the etchant; and

    the optical interference display cell formed after removal of the sacrificial layer is configured to interferometrically reflect light contacting the light reflective surface.

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