Apparatus including showerhead electrode and heater for plasma processing
First Claim
Patent Images
1. A showerhead electrode assembly, comprising:
- a showerhead electrode adapted to be mounted in an interior of a vacuum chamber and supply process gas to a gap in which plasma is generated between the showerhead electrode and a substrate support;
a gas distribution member comprising an axially extending hub and a laterally extending metal plate attached to the showerhead electrode, the gas distribution member including a first gas passage which supplies process gas to a central plenum between the showerhead electrode and the metal plate and a second gas passage which supplies process gas to an outer plenum between the showerhead electrode and the metal plate;
a thermal path member comprising a plate of electrically insulating material surrounding the hub and attached to the gas distribution member; and
a heater comprising a plate of thermally conductive material surrounding the hub and attached to the thermal path member;
wherein the heater transmits heat to the showerhead electrode through a thermal path comprising the gas distribution member and the thermal path member.
1 Assignment
0 Petitions
Accused Products
Abstract
A plasma processing apparatus includes a heater in thermal contact with a showerhead electrode, and a temperature controlled top plate in thermal contact with the heater to maintain a desired temperature of the showerhead electrode during semiconductor substrate processing. A gas distribution member supplies a process gas and radio frequency (RF) power to the showerhead electrode.
130 Citations
13 Claims
-
1. A showerhead electrode assembly, comprising:
-
a showerhead electrode adapted to be mounted in an interior of a vacuum chamber and supply process gas to a gap in which plasma is generated between the showerhead electrode and a substrate support; a gas distribution member comprising an axially extending hub and a laterally extending metal plate attached to the showerhead electrode, the gas distribution member including a first gas passage which supplies process gas to a central plenum between the showerhead electrode and the metal plate and a second gas passage which supplies process gas to an outer plenum between the showerhead electrode and the metal plate; a thermal path member comprising a plate of electrically insulating material surrounding the hub and attached to the gas distribution member; and a heater comprising a plate of thermally conductive material surrounding the hub and attached to the thermal path member; wherein the heater transmits heat to the showerhead electrode through a thermal path comprising the gas distribution member and the thermal path member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A showerhead electrode assembly, comprising:
-
a showerhead electrode with a lower surface facing a substrate support and an upper surface facing away from the substrate support; a gas distribution member comprising a laterally extending metal plate with a lower surface thereof attached to the upper surface of the showerhead electrode, an upper surface of the laterally extending metal plate facing away from the showerhead electrode, and an axially extending hub protruding from the upper surface of the gas distribution member, the gas distribution member including a first gas passage which supplies process gas to a central plenum between the showerhead electrode and the metal plate and a second gas passage which supplies process gas to an outer plenum between the showerhead electrode and the metal plate; an electrical insulator plate with a lower surface attached to the upper surface of the gas distribution member and surrounding the axially extending hub of the gas distribution member and an upper surface facing away from the gas distribution member; a top wall of a vacuum chamber with a lower surface attached to the upper surface of the electrical insulator plate, wherein the top wall and the electrical insulator plate are in thermal communication with the showerhead electrode; and a gas supply connected to the axially extending hub of the gas distribution member and in gaseous communication with the showerhead electrode through gas passages extending through the gas distribution member. - View Dependent Claims (11)
-
-
12. A showerhead electrode assembly, comprising:
-
a showerhead electrode with a lower surface facing a substrate support and an upper surface facing away from the substrate support; a gas distribution member with a lower surface attached to the upper surface of the showerhead electrode, an upper surface facing away from the showerhead electrode, and an axially extending hub protruding from the upper surface of the gas distribution member, the gas distribution member including a first gas passage which supplies process gas to a central plenum between the showerhead electrode and the metal plate and a second gas passage which supplies process gas to an outer plenum between the showerhead electrode and the metal plate; an annular electrical insulator plate with a lower surface attached to the upper surface of the gas distribution member and surrounding the axially extending hub of the gas distribution member and an upper surface facing away from the gas distribution member; a top wall of a vacuum chamber with a lower surface attached to the upper surface of the electrical insulator plate, wherein the top wall and the electrical insulator plate are in thermal communication with the showerhead electrode; a gas supply connected to the axially extending hub of the gas distribution member and in gaseous communication with the showerhead electrode through gas passages extending through the gas distribution member; and a heater plate located between the gas distribution member and the electrical insulator plate, wherein the electrical insulator plate directly contacts the heater plate, the heater plate directly contacts the gas distribution member and the gas distribution member directly contacts the showerhead electrode. - View Dependent Claims (13)
-
Specification