Inkjet nozzle arrangement with a stacked capacitive actuator
First Claim
1. An inkjet nozzle arrangement for an inkjet printer, said arrangement comprising:
- a wafer substrate;
a layer of drive circuitry deposited on the wafer substrate;
subsequent etchant layers deposited on the drive circuitry to define a nozzle chamber with walls and a roof structure defining an ink ejection port; and
a stacked capacitive actuator arranged in said chamber, said actuator having electrode plates sandwiched alternately between a compressible polymer, wherein activation of the stacked actuator draws the electrode plates together to compress the polymer storing energy therein, with subsequent de-activation releasing said energy to eject ink from the ejection port.
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Accused Products
Abstract
An inkjet nozzle arrangement for an inkjet printer includes a wafer substrate. A layer of drive circuitry is deposited on the wafer substrate, and subsequent etchant layers are deposited on the drive circuitry to define a nozzle chamber with walls and a roof structure defining an ink ejection port. The arrangement also includes a stacked capacitive actuator arranged in said chamber, said actuator having alternative electrode plates sandwiched between a compressible polymer, wherein activation of the stacked actuator draws the electrode plates together to compress the polymer storing energy therein, with subsequent de-activation releasing said energy to eject ink from the ejection port.
18 Citations
7 Claims
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1. An inkjet nozzle arrangement for an inkjet printer, said arrangement comprising:
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a wafer substrate; a layer of drive circuitry deposited on the wafer substrate; subsequent etchant layers deposited on the drive circuitry to define a nozzle chamber with walls and a roof structure defining an ink ejection port; and a stacked capacitive actuator arranged in said chamber, said actuator having electrode plates sandwiched alternately between a compressible polymer, wherein activation of the stacked actuator draws the electrode plates together to compress the polymer storing energy therein, with subsequent de-activation releasing said energy to eject ink from the ejection port. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification