Acoustic resonator performance enhancement using alternating frame structure
First Claim
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1. An acoustic resonator comprising:
- a substrate;
a first electrode disposed over the substrate;
a piezoelectric layer adjacent the first electrode;
a second electrode adjacent the piezoelectric layer;
an alternating frame region on one of the first and second electrodes, wherein a portion of the alternating frame region satisfies a Bragg condition at a selected wavelength of an acoustic lateral mode.
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Abstract
Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.
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Citations
6 Claims
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1. An acoustic resonator comprising:
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a substrate; a first electrode disposed over the substrate; a piezoelectric layer adjacent the first electrode; a second electrode adjacent the piezoelectric layer; an alternating frame region on one of the first and second electrodes, wherein a portion of the alternating frame region satisfies a Bragg condition at a selected wavelength of an acoustic lateral mode. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification