Liquid crystal display device and manfacturing method thereof
First Claim
1. A liquid crystal display device having first and second substrates and a liquid crystal maintained between the first and second substrates, comprising:
- a gate wiring over one of the first and second substrates;
an insulating film over said gate wiring;
an amorphous semiconductor film over said insulating film;
a source region and a drain region over said amorphous semiconductor film;
a source wiring over one of said source region and said drain region;
an electrode over the other of said source and drain regions;
a pixel electrode formed over said electrode; and
at least first and second gap retaining elements provided for maintaining a gap between the first and second substrates,wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate,wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element,wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, andwherein said pixel electrode covers edges of said amorphous semiconductor film, and one of said source region and said drain region, and contacts with said insulating film.
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Accused Products
Abstract
An electro-optical device typified by an active matrix type liquid crystal display device, is manufactured by cutting a rubbing process, and in addition, a reduction in the manufacturing cost and an improvement in the yield are realized by reducing the number of process steps to manufacture a TFT.
By forming a pixel TFT portion having a reverse stagger type n-channel TFT, and a storage capacitor, by performing three photolithography steps using three photomasks, and in addition, by having a uniform cell gap by forming wall-like spacers by performing one photolithography step, without performing a rubbing process, a multi-domain perpendicular orientation type liquid crystal display device having a wide viewing angle display, and in which a switching direction of the liquid crystal molecules is controlled, can be realized.
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Citations
66 Claims
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1. A liquid crystal display device having first and second substrates and a liquid crystal maintained between the first and second substrates, comprising:
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a gate wiring over one of the first and second substrates; an insulating film over said gate wiring; an amorphous semiconductor film over said insulating film; a source region and a drain region over said amorphous semiconductor film; a source wiring over one of said source region and said drain region; an electrode over the other of said source and drain regions; a pixel electrode formed over said electrode; and at least first and second gap retaining elements provided for maintaining a gap between the first and second substrates, wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate, wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element, wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, and wherein said pixel electrode covers edges of said amorphous semiconductor film, and one of said source region and said drain region, and contacts with said insulating film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A liquid crystal display device comprising:
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a gate wiring comprising a conductive material over one of first and second substrates; an insulating film over the gate wiring; an amorphous semiconductor film over said insulating film; a pair of impurity regions over the amorphous semiconductor film; a source wiring over one of said pair of impurity regions; an electrode over the other of said pair of impurity regions; a pixel electrode over the electrode and extending over said insulating film; at least first and second gap retaining elements provided for maintaining a gap between the first and second substrates; wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate, wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element, and wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, a capacitor portion comprising; a layer comprising the conductive material over the substrate; the insulating film over the conductive material; and the pixel electrode extending over said insulating film, wherein the layer comprising the conductive material is covered by the pixel electrode through the insulating film; wherein said pixel electrode covers edges of said amorphous semiconductor film, and one of said pair of impurity regions, and contacts with said insulating film, and wherein said source wiring includes a first portion formed over one of said pair of impurity regions and a second portion extending in an orthogonal direction with respect to said layer comprising the conductive material. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A liquid crystal display device comprising:
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a gate wiring comprising a first conductive material over one of first and second substrates; an insulating film over the gate wiring; an amorphous semiconductor film over said insulating film; a pair of impurity regions over the amorphous semiconductor film; a source wiring over one of said pair of impurity regions; an electrode over the other of said, pair of impurity regions; a pixel electrode comprising a second conductive material over the electrode, said second conductive material extending over said first conductive material; at least first and second gap retaining elements over the pixel electrode, wherein the at least first and second gap retaining elements are provided for maintaining a gap between the first and second substrates; wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate, wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element, and wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, a terminal portion comprising; a first layer comprising the first conductive material over the substrate; and a second layer extending over the first layer, the second layer comprising the second conductive material, wherein said pixel electrode covers edges of the amorphous semiconductor film, and one of said impurity regions, and contacts with said insulating film. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
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45. A liquid crystal display device comprising:
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a gate wiring comprising a first conductive material over one of first and second substrates; an insulating film over the gate wiring; an amorphous semiconductor film over said insulating film; a pair of impurity regions over the amorphous semiconductor film; a source wiring over one of said pair of impurity regions; an electrode over the other of said pair of impurity regions; a pixel electrode comprising a second conductive material over the electrode, said second conductive material extending over said insulating film and over said first conductive layer; at least first and second gap retaining elements provided for maintaining a gap between the first and second substrates; wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate, wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element, and wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, a capacitor portion comprising; a layer comprising the first conductive material over the substrate; the insulating film over the first conductive material; and said second conductive material extending over the insulating film, wherein the layer comprising the first conductive material is covered by the second conductive material through the insulating film; wherein said source wiring includes a first portion formed over one of said pair of impurity regions and a second portion extending in an orthogonal direction with respect to said layer comprising the first conductive material, a terminal portion comprising; a first layer comprising the first conductive material over the substrate; and a second layer extending over the first layer, the second layer comprising the second conductive material, wherein said pixel electrode covers edges of the amorphous semiconductor film, and one of said impurity regions, and contacts with said insulating film. - View Dependent Claims (46, 47, 48, 49, 50, 51, 52, 53, 54, 55)
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56. A liquid crystal display device comprising:
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a gate wiring over one of first and second substrates; an insulating film over the gate wiring; an amorphous semiconductor film over said insulating film; a pair of impurity regions over the amorphous semiconductor film; a source wiring and an electrode over the pair of impurity regions; a pixel electrode over the electrode; and at least first and second gap retaining elements over the pixel electrode, wherein each of the first and second gap retaining elements has a first end surface facing the first substrate and a second end surface facing the second substrate, wherein the first end surface of the first gap retaining element is smaller than the second end surface of the first gap retaining element, wherein the first end surface of the second gap retaining element is larger than the second end surface of the second gap retaining element, and wherein said pixel electrode covers edges of the amorphous semiconductor film, and one of said pair of impurity regions, and contacts with said insulating film. - View Dependent Claims (57, 58, 59, 60, 61, 62, 63, 64, 65, 66)
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Specification