Optical scan device, optical scan type microscope, observation method, control device, and control program
First Claim
1. A light scanning apparatus comprising:
- at least three mirror scanners disposed at predetermined positions for light scanning; and
a light path switching unit switching between a first light path, in which a highest-speed mirror scanner among said mirror scanners is valid and a second light path in which said highest-speed mirror scanner is invalid, whereinthe light switching unit is separated from and structurally independent of the scanners, andsaid first light path and said second light path are different from one another.
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Accused Products
Abstract
It is an object to realize smooth switching between free scanning and high speed scanning in a light scanning apparatus and a light scanning microscope. To attain the object, a light scanning apparatus includes at least three mirror scanners disposed at predetermined positions of a light path for light scanning, and a light path switching unit switching the light path between a light path in which a highest-speed mirror scanner among the mirror scanners is valid and a light path in which the highest-speed mirror scanner is invalid. Therefore, the switching between a free scanning mode and a high speed scanning mode is performed by the driving of the light switching unit and involves no movement of galvanometer scanners. In addition, since the resonant galvanometer scanner is invalid during the free scanning mode, it is possible to make the resonant galvanometer scanner on standby.
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Citations
12 Claims
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1. A light scanning apparatus comprising:
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at least three mirror scanners disposed at predetermined positions for light scanning; and a light path switching unit switching between a first light path, in which a highest-speed mirror scanner among said mirror scanners is valid and a second light path in which said highest-speed mirror scanner is invalid, wherein the light switching unit is separated from and structurally independent of the scanners, and said first light path and said second light path are different from one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification