Electromechanical system having a dielectric movable membrane and a mirror

• US 7,715,085 B2
• Filed: 05/09/2007
• Issued: 05/11/2010
• Est. Priority Date: 05/09/2007
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Sasagawa, Teruo
• Primary Examiner(s): Sugarman; Scott J
• Assistant Examiner(s): PINKNEY, DAWAYNE
• Application Number:
  US11/746,513
• Publication Number:
  US 20080278788A1
• Time in Patent Office: 1,098 Days
• Field of Search: 359290-292, 359/245, 359223-225, 359/198, 359260-263, 359/298, 359301-303, 359317-318, 359/295
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable reflective element. The movable reflective element includes a flexible dielectric layer and a second reflective layer mechanically coupled to the flexible dielectric layer. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer.

Claims

1. An electromechanical device comprising:

at least one electrode;

a first reflective layer; and

a movable reflective element comprising;

a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer; and

a second reflective layer mechanically coupled to the flexible dielectric layer, wherein the flexible dielectric layer comprises one or more apertures configured to allow routing of electrical signals to the second reflective layer through the flexible dielectric layer.

2. The device of claim 1, wherein the second reflective layer is not spaced from the flexible dielectric layer.

3. The device of claim 1, wherein the flexible dielectric layer comprises SiO₂.

4. The device of claim 1, further comprising an insulating layer between the first reflective layer and the second reflective layer.

5. The device of claim 4, wherein the second reflective layer contacts the insulating layer when the reflective element is in a first position relative to the first reflective layer and wherein the second reflective layer does not contact the insulating layer when the reflective element is in a second position relative to the first reflective layer.

6. The device of claim 4, wherein a first portion and a second portion of the second reflective layer contact the insulating layer when the reflective element is in a first position relative to the first reflective layer, wherein the first portion does not contact the insulating layer when the reflective element is in a second position relative to the first reflective layer, and wherein the second portion contacts the insulating layer when the reflective element is in the second position.

7. The device of claim 1, further comprising a plurality of supports mechanically coupling the first reflective layer and the reflective element.

8. The device of claim 7, further comprising a plurality of support structures on a side of the plurality of supports opposite the first reflective layer.

9. The device of claim 8, wherein the plurality of support structures comprises a conductive material.

10. The device of claim 8, wherein the plurality of support structures comprises a conductive material on the plurality of supports and a rigid dielectric material on the conductive material.

11. The device of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

12. The device of claim 11, further comprising a driver circuit configured to send at least one signal to the display.

13. The device of claim 12, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

14. The device of claim 11, further comprising an image source module configured to send said image data to said processor.

15. The device of claim 14, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

16. The device of claim 11, further comprising an input device configured to receive input data and to communicate said input data to said processor.

17. An electromechanical device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising;

second means for reflecting; and

means for supporting the second reflecting means, the supporting means mechanically coupled to the second reflecting means, the supporting means having a flexible dielectric portion; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means, wherein the supporting means comprises one or more apertures configured to allow routing of electrical signals to the second reflecting means through the supporting means.

18. The device of claim 17, wherein the first reflecting means comprises a first reflective layer.

19. The device of claim 17, wherein the moving means comprises a movable reflective element.

20. The device of claim 17, wherein the second reflecting means comprises a second reflective layer.

21. The device of claim 17, wherein the supporting means comprises a flexible dielectric layer.

22. The device of claim 17, wherein the actuating means comprises at least one electrode.

23. An electromechanical device comprising:

a substrate;

at least one electrode disposed on the substrate;

a first reflective layer disposed on the at least one electrode;

a movable reflective element comprising;

a dielectric layer having a coefficient of thermal expansion, a portion of the dielectric layer configured to flex in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer; and

a second reflective layer mechanically coupled to the dielectric layer;

a plurality of support posts mechanically coupling the first reflective layer and the reflective element, wherein each of the plurality of support posts comprises a portion of the dielectric layer, and wherein the plurality of support posts and the dielectric layer have substantially similar coefficients of thermal expansion; and

an insulating layer disposed between the first reflective layer and the second reflective layer, the insulating layer between adjacent support posts of the plurality of support posts, wherein a first portion of the second reflective layer contacts the insulating layer when the reflective element is in a first position relative to the first reflective layer and contacts the insulating layer when the reflective element is in a second position relative to the first reflective layer, and wherein a second portion of the second reflective layer contacts the insulating layer when the reflective clement is in a first position relative to the first reflective layer and does not contact the insulating layer when the reflective element is in a second position relative to the first reflective layer.

24. The device of claim 23, wherein the second reflective layer is coupled to the flexible dielectric layer such that there is no space therebetween.

25. The device of claim 23, wherein the flexible dielectric layer comprises SiO₂.

26. The device of claim 23, further comprising a plurality of support structures on a side of the plurality of supports opposite the first reflective layer.

27. The device of claim 26, wherein the plurality of support structures further comprises a conductive material.

28. The device of claim 26, wherein the plurality of support structures comprises a conductive material on the plurality of supports and a rigid dielectric material on the conductive material.