Laser system
First Claim
1. An apparatus comprising:
- a very high power line narrowed lithography laser light source comprising;
a solid state seed laser system comprising;
a pre-seed laser providing a pre-seed laser output;
a fiber amplifier receiving the pre-seed laser output and providingan amplified seed laser pulse comprising;
a pulse having a nominal wavelength outside of the DUV range;
a frequency converter modifying the nominal center wavelength of the output of the seed laser system to essentially the nominal center wavelength of the amplifier gain medium;
a first and a second gas discharge laser amplifier gain medium each operating at a different pulse repetition rate from that of the seed laser output;
a beam divider providing each respective first and second amplifier gain medium with output pulses from the seed laser;
a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.
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Accused Products
Abstract
An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse which may comprise: a pulse having a nominal wavelength outside of the DUV range; a frequency converter converting to essentially the wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium operating at different repetition rates from that of the seed laser output; a beam divider providing the amplifier gain mediums with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.
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Citations
30 Claims
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1. An apparatus comprising:
a very high power line narrowed lithography laser light source comprising; a solid state seed laser system comprising; a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse comprising; a pulse having a nominal wavelength outside of the DUV range; a frequency converter modifying the nominal center wavelength of the output of the seed laser system to essentially the nominal center wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium each operating at a different pulse repetition rate from that of the seed laser output; a beam divider providing each respective first and second amplifier gain medium with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An apparatus comprising:
a very high power broad band lithography laser light source comprising; a solid state seed laser system comprising; a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse comprising; a nominal wavelength outside of the DUV range; a frequency converter modifying the nominal center wavelength of the output of the seed laser system to essentially the nominal center wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium each operating at one half of the pulse repetition rate of the seed laser output; a beam divider providing each respective first and second amplifier gain medium with alternating output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a light source laser output light pulse beam having the pulse repetition rate of the solid state seed laser. - View Dependent Claims (25)
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26. An apparatus comprising:
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a lithography laser light source comprising; a solid state seed laser system comprising a CW solid state laser that is externally modulated and is amplified by a fiber amplifier; a first and a second gas discharge laser amplifier gain medium each operating at a different pulse repetition rate than the pulse repetition rate of the seed laser output; a beam divider providing each respective first and second amplifier gain medium with output pulses from the seed laser; a frequency converter modifying the nominal center wavelength of the output of the seed laser system to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser. - View Dependent Claims (27, 28, 29)
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30. An apparatus comprising:
a lithography laser light source comprising; a fiber laser oscillator producing a seed pulse that is externally modulated and amplified by a fiber amplifier; a first and a second gas discharge laser amplifier gain medium each operating at a different pulse repetition rate than the pulse repetition rate of the fiber laser oscillator output; a beam divider providing each respective first and second amplifier gain medium with output pulses from the seed laser; a frequency converter modifying the nominal center wavelength of the output of the fiber laser oscillator to essentially the nominal center wavelength of the amplifier gain medium; and a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the fiber laser oscillator.
Specification