Gas flow rate verification unit
First Claim
1. A gas flow rate verification unit to be mounted downstream of a flow rate control device, comprising:
- a first cutoff valve including a first input port to be connected to the flow rate control device for inputting a gas, a first output port for outputting the gas, and a first valve seat for communicating the first input port and the first output port;
a second cutoff valve including a second input port to be connected to the first cutoff valve, a second output port for outputting the gas, and a second valve seat for communicating the second input port and the second output port;
a communication member to be connected to the first output port and the second input port for communicating the first cutoff valve and the second cutoff valve with each other;
a pressure detector for detecting a pressure of the gas supplied between the first cutoff valve and the second cutoff valve;
a temperature detector for detecting a temperature of the gas supplied between the first cutoff valve and the second cutoff valve; and
a control device for verifying a flow rate of the gas flowing through the flow rate control device by using a result of the pressure detected by the pressure detector and a result of the temperature detected by the temperature detector, whereina volume of the gas from the first valve seat to the second valve seat is not more than a volume from an outlet of the flow rate control device to the first valve seat.
1 Assignment
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Accused Products
Abstract
A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.
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Citations
17 Claims
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1. A gas flow rate verification unit to be mounted downstream of a flow rate control device, comprising:
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a first cutoff valve including a first input port to be connected to the flow rate control device for inputting a gas, a first output port for outputting the gas, and a first valve seat for communicating the first input port and the first output port; a second cutoff valve including a second input port to be connected to the first cutoff valve, a second output port for outputting the gas, and a second valve seat for communicating the second input port and the second output port; a communication member to be connected to the first output port and the second input port for communicating the first cutoff valve and the second cutoff valve with each other; a pressure detector for detecting a pressure of the gas supplied between the first cutoff valve and the second cutoff valve; a temperature detector for detecting a temperature of the gas supplied between the first cutoff valve and the second cutoff valve; and a control device for verifying a flow rate of the gas flowing through the flow rate control device by using a result of the pressure detected by the pressure detector and a result of the temperature detected by the temperature detector, wherein a volume of the gas from the first valve seat to the second valve seat is not more than a volume from an outlet of the flow rate control device to the first valve seat. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification