Methods of making multilayered, hydrogen-containing intermetallic structures

• US 7,718,016 B2
• Filed: 04/07/2006
• Issued: 05/18/2010
• Est. Priority Date: 04/07/2006
• Status: Active Grant

• Current Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Johnson, James Neil, Schild, Ilissa Brooke
• Primary Examiner(s): King; Roy
• Assistant Examiner(s): Yang; Jie
• Application Number:
  US11/399,392
• Publication Number:
  US 20100080934A1
• Time in Patent Office: 1,502 Days
• Field of Search: 148/535
• US Class Current: 148/535
• CPC Class Codes: C23C 14/165 by cathodic sputtering
• CPC Class Codes: C23C 14/5826 Treatment with charged particles C23C14/582 takes precedence
• CPC Class Codes: C23C 14/5846 Reactive treatment
• CPC Class Codes: C23C 28/023 only coatings of metal elements only
• CPC Class Codes: C23C 28/025 with at least one zinc-based layer
• CPC Class Codes: C23C 28/322 only coatings of metal elements only
• CPC Class Codes: C23C 28/3225 with at least one zinc-based layer
• CPC Class Codes: C23C 28/345 with at least one oxide layer
• CPC Class Codes: C23C 28/42 characterized by the composition of the alternating layers

Abstract

Methods of making multilayered, hydrogen-containing intermetallic structures including at least two adjacent metal layers are disclosed. At least one of the metal layers contains hydrogen, which can be introduced into the metal by plasma hydrogenation. The intermetallic structures can have high hydrogen contents and micrometer-sized and nanometer-sized dimensions.

Claims

1. A method of making a multilayered, hydrogen-containing intermetallic structure that releases thermal energy and produces a reaction product upon activation through an intermetallic reaction, the method comprising:

depositing a first layer;

depositing a second layer, the first and second layers contacting each other and having respective compositions effective to undergo an intermetallic reaction when activated; and

introducing hydrogen into at least one of the first and second layers by plasma hydrogenation;

wherein the first and second layers are selected from the group consisting of;

a first layer of elemental Ti, and a second layer of elemental B;

a first layer of elemental C, and a second layer of elemental Ti;

a first layer of elemental C, and a second layer of elemental Zr; and

a first layer of elemental Zn, and a second layer of elemental Zr.

2. The method of claim 1, wherein one of the first and second layers is subjected to plasma hydrogenation before the other one of the first and second layers is deposited.

3. The method of claim 1, wherein at least one of the first and second layers has an average hydrogen concentration of at least about 50 at % after the plasma hydrogenation.

4. The method of claim 3, wherein at least one of the first and second layers has an average hydrogen concentration of at least about 60 at % after the plasma hydrogenation.

5. The method of claim 1, wherein the first layer or the second layer is deposited on a substrate of a material selected from the group consisting of metals, ceramics, glasses, semiconductors, polymers and combinations thereof.

6. The method of claim 5, wherein:

the substrate is of a metal; and

the method further comprises introducing hydrogen into the substrate by plasma hydrogenation.

7. The method of claim 1, wherein each of the first and second layers has a thickness of less than about 100 nm.

8. The method of claim 7, wherein each of the first and second layers has a thickness of less than about 10 nm.

9. The method of claim 1, wherein the hydrogen introduced by plasma hydrogenation sits interstitially in the at least one of the first and second layers.

10. The method of claim 1, wherein each of the layers has a thickness of about 10 nm to about 100 nm.

11. A method of making a multilayered, hydrogen-containing intermetallic structure, the method comprising:

depositing a first layer;

depositing a second layer, the first and second layers contacting each other and having respective compositions effective to undergo a first intermetallic reaction when activated;

depositing a third layer;

depositing a fourth layer, the third and fourth layers contacting each other and having respective compositions effective to undergo a second intermetallic reaction when activated;

wherein the first and second layers and the third and fourth layers, respectively, are of an alternating layer structure of elements selected from the group consisting of;

elemental Ti, and elemental B;

elemental C, and elemental Ti;

elemental C, and elemental Zr; and

elemental Zn, and elemental Zr,

introducing hydrogen into at least one of the first, second, third and fourth layers by plasma hydrogenation;

wherein each of the first, second, third and fourth layers has a thickness of about 10 nm to about 100 nm.

12. The method of claim 11, wherein each of the first, second, third and fourth layers is subjected to plasma hydrogenation.

13. The method of claim 12, wherein the first, second and third layers, respectively, are subjected to plasma hydrogenation before the second, third and fourth layers, respectively, are deposited.

14. The method of claim 11, wherein at least one of the first, second, third and fourth layers has an average hydrogen concentration of at least about 50 at % after the plasma hydrogenation.

15. The method of claim 14, wherein at least one of the first, second, third and fourth layers has an average hydrogen concentration of at least about 60 at % after the plasma hydrogenation.

16. The method of claim 11, wherein one of the first, second, third and fourth is deposited on a substrate of a material selected from the group consisting of metals, ceramics, glasses, semiconductors, polymers and combinations thereof.

17. The method of claim 16, wherein:

the substrate is of a metal; and

the method further comprises introducing hydrogen into the substrate by plasma hydrogenation.

18. The method of claim 11, wherein the hydrogen introduced by plasma hydrogenation sits interstitially in the at least one of the first, second, third and fourth layers.

19. A method of making a multilayered, hydrogen-containing intermetallic structure, the method comprising:

depositing a plurality of layers to form an intermetallic structure, the intermetallic structure including at least two adjacent layers having respective compositions effective to undergo an intermetallic reaction when activated; and

wherein the intermetallic structure comprises adjacent layers of an alternating layer structure of elements selected from the group consisting of;

elemental Ti, and elemental B;

elemental C, and elemental Ti;

elemental C, and elemental Zr; and

elemental Zn, and elemental Zr,

introducing hydrogen into at least one layer by plasma hydrogenation;

wherein each of the layers has a thickness of about 10 nm to about 100 nm.

20. The method of claim 19, wherein the intermetallic structure is subjected to plasma hydrogenation before all layers have been deposited.

21. The method of claim 19, wherein the intermetallic structure is subjected to plasma hydrogenation after all layers have been deposited.

22. The method of claim 19, wherein at least one layer has an average hydrogen concentration of at least about 60 at % after the plasma hydrogenation.

23. The method of claim 19, wherein one of the layers is deposited on a substrate of a material selected from the group consisting of metals, ceramics, glasses, semiconductors, polymers and combinations thereof.

24. The method of claim 23, wherein:

the substrate is of a metal; and

the method further comprises introducing hydrogen into the substrate by plasma hydrogenation.

25. The method of claim 19, wherein the intermetallic structure comprises at least 10 layers.

26. The method of claim 19, wherein the intermetallic structure comprises at least 100 layers.

27. The method of claim 19, wherein the intermetallic structure comprises at least 1000 layers.

28. The method of claim 19, wherein the intermetallic structure comprises layers having compositions effective to undergo at least two different intermetallic reactions when activated.