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Semiconductor manufacturing process monitoring

  • US 7,720,560 B2
  • Filed: 07/26/2007
  • Issued: 05/18/2010
  • Est. Priority Date: 07/26/2007
  • Status: Expired due to Fees
First Claim
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1. A method for monitoring a semiconductor manufacturing process, comprising the steps of:

  • defining at least one process window time (PWT);

    retrieving process data from a process tool;

    storing said process data;

    analyzing said process data;

    generating an action sequence indication based on the outcome of the analyzing step;

    accepting at least one process window time from a user;

    detecting an initiation event;

    initiating a monitoring sequence;

    executing an action sequence;

    issuing at least one operator alert,establishing a process window time for a particular process tool;

    associating the process window time with a particular job; and

    wherein the step of detecting an initiation event comprises the step of detecting the expiry of the process window time.

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