Showerhead mounting to accommodate thermal expansion

• US 7,722,925 B2
• Filed: 02/23/2005
• Issued: 05/25/2010
• Est. Priority Date: 02/24/2004
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Sterling, William Norman, White, John M.
• Primary Examiner(s): Parker; Frederick J.
• Assistant Examiner(s): Gambetta; Kelly M
• Application Number:
  US11/063,454
• Publication Number:
  US 20050183827A1
• Time in Patent Office: 1,917 Days
• Field of Search: None
• US Class Current: 427/248.1
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32522 Temperature

Abstract

Methods and apparatus for accommodating thermal expansion of a showerhead. In a first aspect of the invention, the showerhead is movably supported by resting a rim of the showerhead on a support shelf. In a second aspect, the showerhead is suspended from the chamber wall by a plurality of hangers that are connected to the showerhead, the chamber wall, or both by pins that slide within slots so as to permit the hangers to slide radially to accommodate thermal expansion of the showerhead in the radial direction. In a third aspect, the showerhead is suspended from the wall of the vacuum chamber by a plurality of rods or flexible wires. In a fourth aspect, the showerhead is connected near its perimeter to a second material having a greater thermal expansion coefficient than the showerhead. In a fifth aspect, a heater is mounted behind the showerhead to reduce the temperature differential between the top and bottom surfaces of the showerhead or to reduce heat transfer from the workpiece to the showerhead.

Claims

1. A method of dispensing gas into a vacuum chamber, comprising the steps of:

providing a vacuum chamber having a chamber wall that encloses a chamber interior;

positioning a shelf within the chamber interior, wherein the shelf has an upward facing surface;

providing a showerhead having a radially outer perimeter, a rim that includes said radially outer perimeter, an upper surface, a lower surface, and one or more gas orifices extending between the upper surface and the lower surface, wherein the rim of the showerhead includes a downward facing surface;

positioning the showerhead within the chamber interior so that the downward facing surface of the rim of the showerhead rests on the upward facing surface of the shelf and so that the rim of the showerhead is free to slide along the upward facing surface of the shelf; and

flowing gas through the gas orifices of the showerhead into the chamber interior.

2. A method according to claim 1, wherein the mounting step further comprises:

covering a surface of the chamber wall that faces the chamber interior with a dielectric liner;

wherein the dielectric liner includes said shelf.

3. A method according to claim 1, wherein:

the showerhead is rectangular;

the rim is rectangular and has four sides; and

the shelf comprises four distinct pieces that respectively abut the four respective sides of the rim.

4. A method according to claim 1, wherein the shelf is one continuous piece.

5. A method according to claim 1, wherein:

the shelf comprises a plurality of pieces separated by gaps; and

the gaps between adjacent pieces of the shelf have a combined cross-sectional area that is less than one-tenth of the combined cross-sectional area of the narrowest portion of each of the outlet orifices of the showerhead.

6. A method according to claim 1, further comprising the steps of:

providing one or more gas inlet orifices within the chamber wall;

providing said shelf so that said shelf comprises a plurality of pieces; and

connecting an outer portion of each piece of the shelf to the chamber wall so that the chamber wall, the showerhead, and the pieces of the shelf collectively enclose a volume that is in fluid communication with the gas inlet orifices of the chamber wall and the gas outlet orifices of the showerhead;

wherein the step of flowing gas through the gas orifices of the showerhead comprises the step of flowing an amount of gas through the gas inlet orifices into said volume; and

wherein adjacent pieces of the shelf are separated by gaps that are sufficiently small so that, during the step of flowing said amount of gas through the gas inlet orifices, at least ninety percent of said amount of gas flows through the gas outlet orifices.

7. A method according to claim 1, wherein:

the chamber wall includes a gas inlet manifold top wall having at least one gas inlet orifice; and

the step of positioning said shelf includes the step of providing a hanger having an upper portion connected to the gas inlet manifold top wall and having a lower portion connected to the shelf.

8. A method according to claim 7, wherein the gas inlet manifold top wall, the hanger, the shelf, the showerhead rim, and the showerhead are each electrically conductive and are connected together in series so as to provide an electrically conductive connection between the gas inlet manifold top wall and the showerhead.

9. A method according to claim 1, wherein:

the showerhead is not supported at its rim by any portion of the vacuum chamber other than said shelf.

10. A method according to claim 1, wherein:

the showerhead is not supported at its rim by any structure other than said shelf.

11. A method according to claim 1, wherein:

the showerhead is not supported at its rim other than by said shelf.

12. A method of dispensing gas into a vacuum chamber, comprising the steps of:

providing a vacuum chamber having a gas inlet and having a chamber wall that encloses a chamber interior;

positioning a shelf within the chamber interior, wherein the shelf has an upward facing surface;

providing within the chamber interior a showerhead having;

(i) a central portion that includes an upper surface, a lower surface, and one or more gas passageways extending between the upper surface and the lower surface, wherein the gas passageways are in fluid communication with the gas inlet so as to conduct gas flow from the gas inlet through the gas passageways into the chamber interior, and

(ii) a rim that is radially outward of the central portion, wherein the rim of the showerhead includes a downward facing surface, and wherein the rim does not include any gas passageway that conducts gas flow from the gas inlet through the rim into the chamber interior;

resting the downward facing surface of the rim of the showerhead on the upward facing surface of the shelf so that the rim of the showerhead is free to slide along the upward facing surface of the shelf; and

flowing gas from the gas inlet through the gas passageways of the showerhead into the chamber interior.

13. A method according to claim 12, wherein:

the shelf comprises a plurality of pieces separated by gaps; and

the gaps between adjacent pieces of the shelf have a combined cross-sectional area that is less than one-tenth of the combined cross-sectional area of the narrowest portion of each of the outlet orifices of the showerhead.

14. A method according to claim 12, further comprising the steps of:

providing one or more gas inlet orifices within the chamber wall;

providing said shelf so that said shelf comprises a plurality of pieces; and

connecting an outer portion of each piece of the shelf to the chamber wall so that the chamber wall, the showerhead, and the pieces of the shelf collectively enclose a volume that is in fluid communication with the gas inlet orifices of the chamber wall and the gas outlet orifices of the showerhead;

wherein the step of flowing gas through the gas orifices of the showerhead comprises the step of flowing an amount of gas through the gas inlet orifices into said volume; and

wherein adjacent pieces of the shelf are separated by gaps that are sufficiently small so that, during the step of flowing said amount of gas through the gas inlet orifices, at least ninety percent of said amount of gas flows through the gas outlet orifices.

15. A method according to claim 12, wherein:

the showerhead is not supported at its rim by any portion of the vacuum chamber other than said shelf.

16. A method according to claim 12, wherein:

the showerhead is not supported at its rim by any structure other than said shelf.

17. A method according to claim 12, wherein:

the showerhead is not supported at its rim other than by said shelf.

18. A method according to claim 12, wherein:

the rim of the showerhead is not supported by any portion of the vacuum chamber other than said shelf.

19. A method according to claim 12, wherein:

the rim of the showerhead is not connected to any portion of the vacuum chamber other than said shelf.

20. A method according to claim 12, wherein:

the shelf comprises a plurality of distinct pieces.