Monitoring system comprising infrared thermopile detector

• US 7,723,685 B2
• Filed: 04/01/2008
• Issued: 05/25/2010
• Est. Priority Date: 05/08/2002
• Status: Expired due to Fees

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Arno, Jose I.
• Primary Examiner(s): Porta, David P
• Assistant Examiner(s): VU, MINDY D
• Application Number:
  US12/060,686
• Publication Number:
  US 20090039266A1
• Time in Patent Office: 784 Days
• Field of Search: 250/343
• US Class Current: 250/343
• CPC Class Codes: G01J 5/0007 of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
• CPC Class Codes: G01J 5/0014 for sensing the radiation from gases, flames
• CPC Class Codes: G01J 5/025 Interfacing a pyrometer to an external device or network; User interface
• CPC Class Codes: G01J 5/12 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: Y10T 483/16 with means to transfer work

Abstract

The present invention relates to a semiconductor processing system that employs infrared-based thermopile detector for process control, by analyzing a material of interest, based on absorption of infrared light at a characteristic wavelength by such material. In one embodiment, an infrared light beam is transmitted through a linear transmission path from an infrared light source through a sampling region containing material of interest into the thermopile detector. The linear transmission path reduces the risk of signal loss during transmission of the infrared light. The transmission path of the infrared light may comprise a highly smooth and reflective inner surface for minimizing such signal loss during transmission.

Claims

1. A system for treatment of an effluent material, said system comprising:

an inlet conduit arranged to receive the effluent material from an upstream processing unit;

a sampling region for the effluent material in flow communication with the inlet conduit, the sampling region defining a radiation transmission path;

an infrared radiation source constructed and arranged to emit infrared radiation into the sampling region; and

a thermopile detector constructed and arranged to receive at least a portion of the infrared radiation following passage thereof through the sampling region, and arranged to responsively generate an output signal correlative of at least one of (i) effluent material composition and (ii) concentration of an abatable component of the effluent material within the sampling region; and

a control element arranged to receive the output signal from the thermopile detector and arranged to control an effluent abatement apparatus, based on the received output signal to maintain effluent material and/or abatable component discharge below a predetermined level.

2. The system of claim 1, further comprising any of the following:

(a) a heating element distinct from said infrared radiation source is adapted to heat at least a portion of the transmission path;

(b) said transmission path comprises an inner surface characterized by a roughness in a range of from about 0.012 μ

m Ra to about 1.80 μ

m Ra; and

(c) at least one gas introduction element is arranged to introduce a gas between the infrared radiation source and the thermopile detector.

3. The system of claim 2, comprising a heating element distinct from said infrared radiation source is adapted to heat at least a portion of the transmission path.

4. The system of claim 2, wherein the transmission path comprises an inner surface characterized by a roughness in a range of from about 0.012 μ

m Ra to about 1.80 μ

m Ra.

5. The system of claim 2, comprising at least one gas introduction element arranged to introduce a gas between said infrared radiation source and said thermopile detector.

6. The system of claim 5, wherein the effluent material comprises particles subject to being deposited in or on any of the infrared source, the sampling region, and the thermopile detector, and said at least one gas introduction element is adapted to reduce formation of or remove particles in or on any of the infrared source, the sampling region, and the thermopile detector.

7. The system of claim 5, wherein said at least one gas introduction element is adapted to introduce the gas along a direction that is substantially perpendicular to the effluent material flow.

8. The system of claim 5, wherein said at least one gas introduction element is adapted to introduce the gas along a direction that is substantially parallel to the effluent material flow.

9. The system of claim 5, wherein:

said at least one gas introduction element is adapted to generate one or more sheaths of gas that encompass a flow of the effluent material through the sampling region;

said at least one gas introduction element comprises at least one porous medium through which said gas flows;

said inner surface has a roughness in a range of from 0.10 μ

m Ra to 0.80 μ

m Ra and a reflectivity in a range of from 70% to 99%;

said radiation transmission path is substantially linear; and

said infrared radiation source and said thermopile detector are aligned along opposing ends of said radiation transmission path.

10. The system of claim 1, wherein the control element comprises an integrated circuit board that is arranged in immediate signal receiving relationship with said thermopile detector for minimizing signal loss during signal transmission, wherein said integrated circuit board is positioned adjacent to said thermopile detector.

11. The system of claim 1, wherein the thermopile detector is constructed and arranged to responsively generate an output signal correlative of effluent material composition.

12. The system of claim 1, wherein the thermopile detector is constructed and arranged to responsively generate an output signal correlative of a concentration of the abatable component.

13. The system of claim 1, wherein at least one infrared radiation filter element is optically coupled between the infrared radiation source and the thermopile detector.

14. The system of claim 13, wherein the at least one infrared radiation filter element is coupled to the thermopile detector.

15. The system of claim 13, wherein the at least one infrared radiation filter element is adapted to allow transmission or passage of a desired spectral portion of the infrared radiation, said portion being characterized by a predetermined wavelength range.

16. The system of claim 15, wherein said desired spectral portion of said infrared radiation encompasses an absorption wavelength that is characteristic to the concentration of the abatable component.

17. The system of claim 15, wherein said desired spectral portion of said infrared radiation encompasses an absorption wavelength that is characteristic to the effluent material composition.

18. The system of claim 15, wherein said desired spectral portion of said infrared radiation encompasses a wavelength substantially unabsorbed.

19. The system of claim 1, wherein the upstream processing unit comprises a chemical vapor deposition chamber.

20. A method for treatment of an effluent material from an upstream processing unit with an effluent abatement apparatus, said method comprising:

providing a system for treatment of an effluent material, as claimed in claim 1;

arranging the inlet conduit to receive the effluent material from the upstream processing unit;

operating said system to generate the output signal correlative of at least one of (i) material effluent composition and (ii) concentration of an abatable component of the effluent material within the sampling region; and

controlling the effluent abatement apparatus, with the control element receiving the output signal from the thermopile detector, based on the received output signal, to maintain effluent material and/or abatable component discharge below a predetermined level.