Vibrating gyrosensor and vibrating element
First Claim
1. A vibrating gyrosensor comprising:
- a support substrate on which a wiring pattern having a plurality of lands is formed; and
a vibrating element mounted on a surface of the support substrate the vibrating element having a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part,wherein,the vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order, anda reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
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Accused Products
Abstract
A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.
23 Citations
18 Claims
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1. A vibrating gyrosensor comprising:
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a support substrate on which a wiring pattern having a plurality of lands is formed; and a vibrating element mounted on a surface of the support substrate the vibrating element having a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part, wherein, the vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order, and a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A vibrating gyrosensor comprising:
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a support substrate on which a wiring pattern having a plurality of lands is formed; and a vibrating element mounted on a surface of the support substrate, the vibrating element having a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part, wherein, the vibrator part has a first electrode layer, a piezoelectric layer, a second electrode layer, and an insulating protective layer for sealing the first electrode layer, the piezoelectric layer, and the second electrode layer, which are formed on the substrate-facing surface in that order, and a reinforcing part is formed at the base end of the vibrator so that the sectional area of the vibrator part gradually increases toward the base part. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A vibrating gyrosensor comprising:
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a support substrate on which a wiring pattern having a plurality of lands is formed; and a vibrating element mounted on a surface of the support substrate the vibrating element formed using an undoped single crystal silicon substrate as a base material and includes a base part having a mounting surface on which a plurality of terminals to be connected to the lands is formed, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part, wherein, the vibrator has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order, and a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator gradually increases toward the base part. - View Dependent Claims (17, 18)
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Specification